Transmissive metal grating and preparation method thereof

A metal grating, transmissive technology, applied in diffraction grating, photosensitive material processing, microlithography exposure equipment, etc., can solve the problems of poor radiation resistance, poor corrosion resistance, poor impact resistance, etc. The effect of low cost and few steps

Inactive Publication Date: 2006-06-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

Although this kind of grating is widely used in machine tools and instruments, it has the following disadvantages: poor impac

Method used

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  • Transmissive metal grating and preparation method thereof
  • Transmissive metal grating and preparation method thereof

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Embodiment Construction

[0015] Such as figure 1 , figure 2 As shown, the present invention includes a metal substrate 1, a grating light stripe 2 and a dark stripe 3 on the upper and lower surfaces of the metal substrate 1. The grating light stripe 2 is a gap on the metal substrate 1 with a light transmittance of 100%, and the dark stripe 3 is a metal The substrate 1 itself has a light transmittance of 0%, and the metal substrate 1 is a thin sheet or thin ruler of stainless steel, copper, or aluminum.

[0016] The manufacturing method of the present invention will be described in detail below taking stainless steel sheet as an example:

[0017] ① After selecting a stainless steel sheet of appropriate size and thickness and leveling it, use dilute nitric acid with a concentration of 9-11% to remove oxides on the surface of the stainless steel sheet, and use 10-20% concentrated lye to remove oil stains on the surface of the stainless steel sheet;

[0018] ②Use HNO 3 Solution for deep treatment of stainles...

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Abstract

The invention discloses a transmission type metal raster, which comprises the following parts: metal base plate, raster bright fringe and raster dark fringe, wherein the raster bright fringe is the gap of metal base plate with 100 percent light transmittance ratio; the dark fringe is metal base plate itself without light transmission; the metal base plate is stainless steel, copper and aluminum film or metal ruler. The transmission type metal raster making method comprises the following steps: washing the metal base plate surface; coating even thickness photoresist on two sides of base plate; removing the dilute agent of photoresist by drying; placing the base plate in two same raster motherboards to align then exposing; developing through the developing liquid; corroding the toast hard film in the FeCl3 liquid; removing the photoresist; cleaning the base plate surface.

Description

Technical field [0001] The invention relates to the technical field of optical metering devices and moiré fringes, in particular to a transmissive metal grating and a manufacturing process thereof. Including long and circular grating areas. Background technique [0002] Currently, the widely used transmission type grating is made of grating lines on glass. The dark fringes of the grating are mostly chromium oxide lines on the surface of the glass, and the bright fringes are the glass itself. Although this kind of grating is widely used in machine tools, instruments and equipment, it has the following shortcomings: poor impact resistance, poor corrosion resistance, and poor radiation resistance, so it cannot meet the needs of aviation and aerospace. Summary of the invention [0003] The technical solution of the present invention overcomes the shortcomings of the prior art, and provides a transmissive metal grating with light weight, good contrast, good line stability, good impac...

Claims

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Application Information

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IPC IPC(8): G02B5/18G03F7/20G03F7/26
Inventor 周翠花李代学梁跃兵
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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