Method of producing photon scanning tunneling microscope probe with optical fiber and Indium-Tin-oxide

A technology of indium tin oxide and scanning tunneling, which is applied in the direction of scanning probe technology, scanning probe microscopy, and manufacturing microstructure devices, etc., can solve the problems of inability to use electron transmission, photon and detection photon functional characteristics reduction, etc., Achieve the effect of excellent electrical conductivity and light transmission performance

Inactive Publication Date: 2006-07-19
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] It can be seen that the bare optical fiber probe tip made by the prior art can only be used for photon transmission and photon detection, and cannot be used for electron transmission; metal aluminum film, silicon dioxide film, gold film or spraying two Tin oxide (SnO 2 ) oxide thin film, although the tip of the fiber optic probe has the function of conductivity, but the functional characteristics of the probe to transmit photons and detect photons are reduced.

Method used

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  • Method of producing photon scanning tunneling microscope probe with optical fiber and Indium-Tin-oxide

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Embodiment 1

[0027] A method for making photon scanning tunneling microscope probe with optical fiber and indium tin oxide, is characterized in that comprising the steps:

[0028] (1) Pretreatment of optical fiber: remove the optical fiber coating, cut it into small sections with a length of 1.0-2.0cm, and clean it;

[0029] (2) Preparation of buffer solution: with NH 4 F, HF and H 2 O is an etchant, prepared as a buffer solution; the buffer solution consists of NH 4 F, HF, H 2 O is obtained by preparing 10 grams, 20 grams and 100 grams respectively;

[0030] (3) Optical fiber chemical etching: immerse 0.1-0.3 mm of one end of the optical fiber obtained in step (1) in the buffer solution prepared in step (2), take out the needle tip immediately after etching is completed, and clean it with deionized water to obtain the tip A needle tip with a radius of curvature of about 40nm;

[0031] (4) Evaporation deposition of metal conductive film: the optical fiber obtained in step (3) is place...

Embodiment 2

[0039] A method for making photon scanning tunneling microscope probe with optical fiber and indium tin oxide, is characterized in that comprising the steps:

[0040] (1) Pretreatment of optical fiber: remove the optical fiber coating, cut it into small sections with a length of 1.0-2.0cm, and clean it;

[0041] (2) Preparation of buffer solution: with NH 4 F, HF and H 2 O is an etchant, prepared as a buffer solution; the buffer solution consists of NH 4 F, HF, H 2 O is obtained by preparing 10 grams, 30 grams and 100 grams respectively;

[0042] (3) Optical fiber chemical etching: immerse 0.1-0.3 mm of one end of the optical fiber obtained in step (1) in the buffer solution prepared in step (2), take out the needle tip immediately after etching is completed, and clean it with deionized water to obtain the tip A tip with a radius of curvature of about 60nm;

[0043] (4) Evaporation deposition of metal conductive film: the optical fiber obtained in step (3) is placed in th...

Embodiment 3

[0050] A method for making photon scanning tunneling microscope probe with optical fiber and indium tin oxide, is characterized in that comprising the steps:

[0051] (1) Pretreatment of optical fiber: remove the optical fiber coating, cut it into small sections with a length of 1.0-2.0cm, and clean it;

[0052] (2) Preparation of buffer solution: with NH 4 F, HF and H 2 O is an etchant, prepared as a buffer solution; the buffer solution consists of NH 4 F, HF, H 2 O is obtained by preparing 10 grams, 25 grams and 100 grams respectively;

[0053] (3) Optical fiber chemical etching: immerse 0.1-0.3 mm of one end of the optical fiber obtained in step (1) in the buffer solution prepared in step (2), take out the needle tip immediately after etching is completed, and clean it with deionized water to obtain the tip A tip with a radius of curvature of about 50nm;

[0054] (4) Evaporation deposition of metal conductive film: the optical fiber obtained in step (3) is placed in th...

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Abstract

The invention discloses a method for using light guide fiber and indium stannic oxide to make the optical scanning channel microscope probe. The method comprises: choosing the optical fiber, preparing for the buffer solution, chemical etching the optical fiber, evaporated depositing the mental conductive film, etching removing the optical fiber push-button metal membrane, magnetron sputtering depositing the ITO film, connecting the pivot-end and the base. The optical scanning channel microscope probe can be sued in scanning channel microscope, light quantum scanning channel microscope and scanning near-field optics microscope and so on.

Description

technical field [0001] The invention relates to the field of plating treatment of metal oxide materials, in particular to a method for making photon scanning tunneling microscope probes with optical fiber and indium tin oxide. Background technique [0002] Dalian University of Technology and its cooperative units and collaborators have disclosed fiber optic probe tips containing various bare or metal-coated films, vacuum-evaporated fiber optic probe tips of aluminum film and silicon dioxide protective film, the diameter of the probe tip and the system’s The resolution reaches nanoscale (see Yao Junen, Wu Shifa, etc. Development of Photon Scanning Tunneling Microscope [Science and Technology Achievements]. Beijing Wanfang Data: Record No. 160552, 199306 (identification date); Wu Shifa. Combination of Atomic Force and Photon Scanning Tunneling Microscope Image Decomposition Method [P]. Chinese patent application number: 96111979, 1996-9-3; Xu Kai. Development of fiber optic pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B21/04G01N13/12H01L21/00B81C1/00G01Q70/16
Inventor 邓文礼
Owner SOUTH CHINA UNIV OF TECH
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