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Projected electrode based on polymer substrate, its making method and use

A technology of protruding electrodes and polymers, applied in applications, printed circuit manufacturing, electrical components, etc., can solve problems such as limiting the effect of nerve stimulation or signal recording, and achieve the effect of improving the effect and simple electrode preparation method

Inactive Publication Date: 2006-10-25
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Electrodes produced by this process are sandwiched (a metal layer is sandwiched between polymers), and the stimulation point for the working electrode is recessed [T.S. Martin Schuettler, "18 polar Hybrid Cuff Electrodes for Stimulation of Peripheral Nerves," presented at The 5th Annual International Conference of the International Functional Electrical Stimulation Society, 2000.], Limiting the Effects of Neural Stimulation or Signal Recording

Method used

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  • Projected electrode based on polymer substrate, its making method and use
  • Projected electrode based on polymer substrate, its making method and use
  • Projected electrode based on polymer substrate, its making method and use

Examples

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Embodiment 1

[0035]The preparation method of the raised electrode based on the polymer substrate of the present invention will be further described below by using polyimide polymer and grade 6809 optical dissection glue in conjunction with the accompanying drawings.

[0036] 1. Clean the silicon wafer, double-sided silicon oxide wafer, the thickness of the oxide layer is 1000 Ȧ;

[0037] 2. Bake the silicon wafer at 120°C for 20 minutes, spin-coat 6809 photoresist (3000 rpm, 30 seconds) on one side of the oxide layer of the silicon wafer, and bake at 80°C for 20 minutes;

[0038] 3. Spin-coat 6809 photoresist on the other side of the silicon wafer (3000 rpm, 30 seconds), pre-bake at 80°C for 20 minutes, expose, develop, and then bake at 120°C for 30 minutes to obtain the electrode protrusion corresponding to the stimulation point window graphics;

[0039] 4. In a shaker, a buffer solution of hydrofluoric acid (BOE, HF:NH 4 F: DI = 3: 6: 9) Soak the silicon wafer for 10 minutes, transfer ...

Embodiment 2

[0052] The protruding electrode on the polymer substrate prepared in Example 1 is applied to peripheral nerve stimulation, and the method is as follows: the polymer substrate with the protruding electrode is bonded to the stretched silicone rubber film, and the silicone rubber shrinks to form a Figure 5 Cylindrical structure shown. The cylindrical structure can wrap the nerve, and the raised electrode structure ensures good contact between the electrode stimulation point and the nerve, and implements more effective electrical signal stimulation.

Embodiment 3

[0054] The polymer base raised electrode prepared in Example 1 is applied to a visual prosthetic optic nerve stimulator in the following manner: the optic nerve 6 is cut open through surgery, and the polymer base 3 made with the raised electrode is inserted into the nerve incision (such as Figure 6 shown), and the incision was sutured, and the external electrical signal was introduced through the cable 7 connected to the protruding electrode. The protruding electrode structure ensures good contact between the electrode stimulation point and the inner nerve bundle of the optic nerve. Effective electrical signal stimulation can be implemented at a lower voltage, which reduces the damage to surrounding tissues caused by electric field and electric heat.

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Abstract

Characters of the invention are that polymer of possessing biocompatibility and flexibility are adopted for base material and fabricated structure of bulge electrode so as to guarantee that stimulation points and nerve are contacted fully in order to improve effect of recording stimulation of neuroelectricity and nervous signals. Preparing procedure includes steps: using anisotropic wet-process erosion to fabricate mould; forming silicon dioxide as sacrificial layer on surface of mouldof silicon oxide chip; through peeling off, glue injecting, and releasing sacrificial layer to obtain raised microelectrode of polymer. The disclosed method for preparing raised electrodes on polymer substrate is compatible to traditional technique of Micro-E1ectro-Mechanical System (MEMS). Features are: volume- producing standardized products. The invention is applicable to nerve rehabilitation, neurobiology etc. areas.

Description

technical field [0001] The invention relates to a preparation method and application of a raised electrode based on a polymer substrate, in particular to a flexible raised electrode based on a micro-electromechanical processing technology, a preparation method and an application thereof. Background technique [0002] Neural engineering system is currently a very active and rapidly developing research field, such as brain-computer interface, neural prosthesis and other issues have received more and more attention. In the neural engineering system, the most basic and critical part is the nerve-electronic interface, that is, the electrode. Its function is mainly manifested in two forms: one is to convert neural activity into electrical signals and record them for analysis and research; the other is to Functional electrical stimulation (FES) is achieved by using electrical signals to stimulate or inhibit neural activity. The performance of electrodes directly affects the qualit...

Claims

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Application Information

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IPC IPC(8): H05K1/02A61B5/04H05K3/00
Inventor 杨梦苏周洪波李刚金庆辉赵建龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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