Photoelectric device
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[0061] Hereinafter, the present invention will be described more specifically by way of example, but is not limited thereto.
[0062] Manufacture of Glass Sheet with Transparent Conductive Film
[0063] Sample 1
[0064] In a production line for float glass, a tin oxide film (SnO.sub.2 film), a silicon oxide film (SiO.sub.2 film), and a fluorine-containing tin oxide film (SnO.sub.2:F film) were formed in this order on a glass ribbon using a plurality of coaters arranged in a float bath. The glass ribbon is formed to have a thickness of 4 mm and the total amount of iron oxide of 0.01 wt % in terms of Fe.sub.2O.sub.3.
[0065] Specifically, the glass ribbon had a temperature of about 650.degree. C. immediately before reaching a coater located at the furthest upstream position, and a mixed gas of dimethyltin dichloride (vapor), oxygen and nitrogen was supplied from the coater, so that a SnO.sub.2 film having a thickness of 25 nm was formed on the glass ribbon. Then, a mixed gas of monosilane, ethy...
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