Tunable Diffraction Grating
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[0061]FIG. 1 schematically shows a tunable diffraction grating 1 according to the present invention in an undeformed state (V=0). The diffraction grating comprises an upper and a lower electrode 2, 3 which encompass an membrane like intermediate layer 4 made out of a deformable material, preferably an elastomeric material. The intermediate layer 4 is held in position by a support 5, if appropriate in a prestretched manner. At least the upper electrode 3 is also made out of a deformable material such that it can deform in lateral direction along with the intermediate layer 4. The intermediate layer 4 and at least the upper electrode 2 are mechanically coupled to each other such that a secondary lateral deformation in xy-plane of the intermediate layer 4 causes a lateral deformation of the upper electrode 2 in the same direction.
[0062]When a voltage (V≠0) is applied to the dielectric elastomer actuator the upper and the lower electrodes 2, 3 attract each other due to electrostatic for...
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