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Preparation method of ultrathin, large-size, high-silicon silicon steel sheet by electron beam physical vapor deposition

A technology of physical vapor deposition and silicon steel sheets, applied in heat treatment equipment, heat treatment process control, manufacturing tools, etc., can solve problems such as incapable of industrial production, and achieve high work efficiency, easy quality, and easy control of process parameters.

Inactive Publication Date: 2009-05-27
HARBIN INST OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to provide an ultra-thin, large-size, high-silicon silicon steel sheet electron beam physical vapor deposition preparation method to solve the problem that the existing ultra-thin, large-size, high-silicon silicon steel sheet can only be prepared in the laboratory and cannot The problem of industrial production

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  • Preparation method of ultrathin, large-size, high-silicon silicon steel sheet by electron beam physical vapor deposition

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specific Embodiment approach 1

[0009] Embodiment 1: The method of this embodiment is as follows: In a vacuum environment, use electron beams as a heat source to bombard the raw material of high-silicon silicon steel sheet, so that the raw material of high-silicon silicon steel sheet is melted into a steam state, and then the high-silicon silicon steel sheet in the steam state is The silicon steel sheet raw material is deposited on the substrate to obtain a high-silicon silicon steel sheet, and the high-silicon silicon steel sheet is peeled off from the substrate. The raw material of the high-silicon silicon steel sheet is the high-silicon ferroalloy raw material, which can be obtained by vacuum smelting with silicon steel sheet scrap (or pure iron) and pure silicon.

[0010] The specific steps of this embodiment are as follows: 1. Prepare high-silicon ferroalloy ingots as raw materials for high-silicon silicon steel sheets: pure iron and pure silicon (pure silicon and silicon steel sheet scraps can also be u...

specific Embodiment approach 2

[0011] Specific implementation mode two: the following combination figure 1 This embodiment will be specifically described. The steps of this embodiment are as follows: 1. Put the pure iron ingot 1 and the pure silicon material 2 into No. 1 crucible 3 and No. 2 crucible 4 respectively, and put a layer of CaF on the surface of the pure iron ingot 1. 2 2. Install the base plate 5, adjust the distance between the base plate 5 and the upper surface of the pure iron ingot 1 between 300-500 mm, scrub the lower surface of the base plate 5 with acetone, seal the vacuum chamber 6, and vacuum the vacuum chamber 6 Vacuum, generally pumped to a vacuum of about 10 -4 Pa; Three, make the substrate 5 rotate around its own center line in its own plane, set the rotating speed to 5-30rpm, and heat the substrate 5 to 500-800°C at the same time; Four, use the electron beam generated by the electron gun 7 to evaporate first CaF 2 powder, thereby forming a layer of 5-10 μm CaF on the lower surfa...

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Abstract

The preparation method for ultrathin lager-size high-silicon electron-beam PVD silicon steel sheet comprises: in vacuum, bombarding with electron beam as heat source to melt the silicon steel sheet material into vapor state; then, depositing the sheet on substrate to obtain the high-silicon silicon sheet plate; finally, uncovering the plate. This invention overcomes the defect in prior art, controls evaporating speed of different material to adjust the product intergradient and thickness, has high efficiency, and special fit to industrialization.

Description

technical field [0001] The invention relates to a method for preparing a silicon steel sheet, in particular to a method for preparing a silicon steel sheet by electron beam physical vapor deposition. Background technique [0002] Fe-6.5wt.% Si silicon steel has excellent soft magnetic properties, such as: low iron loss at medium and high frequencies, small hysteresis stretching, small coercive force, high permeability and saturation magnetic induction, etc., and it also has good stability The advantage is that it is an excellent soft magnetic material. It is especially suitable for the iron core of medium and high frequency motors, transformers and audio transformers. However, due to the poor processability of this material, the traditional rolling process is difficult to process, and it has not been industrialized in China. Only small-sized high-silicon silicon steel sheets can be produced in the laboratory by rapid solidification and other processes. The electron beam ph...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30C23C14/54C21D1/26C21D11/00
Inventor 赫晓东李垚李晓孙跃
Owner HARBIN INST OF TECH
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