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Solar selectivity absorption coating and manufacture method thereof

An absorbing coating, selective technology, applied in the field of solar collectors, to achieve the effect of strong water resistance, high temperature resistance and humidity resistance

Inactive Publication Date: 2008-08-27
江苏亚邦太阳能有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is mainly used under the condition of more than 300°C, and it can be used as a medium-high temperature solar vacuum heat collection tube. The thickness of the absorption layer is 30-200nm, but the patent does not mention that the metal-ceramic film has moisture resistance

Method used

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  • Solar selectivity absorption coating and manufacture method thereof
  • Solar selectivity absorption coating and manufacture method thereof

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Embodiment 1

[0016] see figure 1 , The solar selective absorbing coating in this embodiment includes an absorbing layer 2 deposited on the substrate 1 by sputtering and an anti-reflection layer 3 deposited on the absorbing layer 2 by sputtering. The substrate 1 in this embodiment is an oxygen-free copper tube.

[0017] Absorber layer 2 is made of TiN layer 21, TiO layer 22 and TiO 2 layer 23, the absorber layer 2 has a thickness of 100 nm. The TiN layer 21 is deposited on the oxygen-free copper tube 1 by sputtering, and the thickness of the TiN layer 21 is 40 nm. TiO layer 22 is sputter deposited on TiN layer 21, TiO 2 Layer 23 is sputter deposited on TiO layer 22, TiO layer 22 and TiO 2 The sum of the thicknesses of layers 23 is 60 nm.

[0018] The anti-reflection layer 3 is sputter deposited on TiO 2 SiO on layer 23 2 layer, the thickness of the anti-reflection layer 3 is 100nm.

[0019] The solar selective absorbing coating of this embodiment can be used on the heat collecting t...

Embodiment 2

[0028] see figure 2 , The solar selective absorbing coating in this embodiment includes an absorbing layer 2 deposited on the substrate 1 by sputtering and an anti-reflection layer 3 deposited on the absorbing layer 2 by sputtering. The substrate 1 in this embodiment is a phosphorus deoxidized copper plate.

[0029] Absorber layer 2 is made of TiN layer 21, TiO layer 22 and TiO 2 layer 23, the absorber layer 2 has a thickness of 120 nm. The TiN layer 21 is deposited on the phosphorus deoxidized copper plate 1 by sputtering, and the thickness of the TiN layer 21 is 50 nm. TiO layer 22 is sputter deposited on TiN layer 21, TiO 2 Layer 23 is sputter deposited on TiO layer 22, TiO layer 22 and TiO 2 The sum of the thicknesses of layers 23 is 70 nm.

[0030] The anti-reflection layer 3 is sputter deposited on TiO 2 SiO on layer 23 2 layer, the thickness of the antireflection layer 3 is 120nm.

[0031] The solar selective absorbing coating of this embodiment can be used on ...

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Abstract

The invention discloses solar energy selective absorbing coating and a method for preparing the absorbing coating, the absorbing coating comprises an absorbing layer and an anti reflection layer, wherein the absorbing layer is composed of a TiN layer which is sputtered and deposited on a basal body, a TiO layer which is sputtered and deposited on the TiN layer and a TiO2 layer which is sputtered and deposited on the TiO layer, and the anti reflection layer is an SiO2 layer which is sputtered and deposited on the TiO2 layer. The method for preparing the absorbing coating comprises following steps: installing the basal body in a film plating machine and pumping vacuum, then, inputting argon, inputting negative voltage to bombard and wash the basal body, then, inputting negative bias to energize a titanium target, inputting nitrogen, depositing the TiN layer, then, inputting oxygen, depositing the TiO layer and the TiO2 layer, then, energizing an SiO2 target, inputting the argon and the oxygen, and depositing the anti reflection layer. The solar energy selective absorbing coating of the invention is suitable for flat plate solar collectors and has the advantages of high temperature resistance, humidity resistance and the like.

Description

technical field [0001] The invention belongs to the technical field of solar heat collectors, and in particular relates to a solar selective absorption coating and a preparation method thereof. Background technique [0002] As we all know, solar selective absorbing coatings have a great influence on the heat collection efficiency of solar collectors. The larger the ratio of the coating's solar absorptivity α to thermal emissivity ε, the higher the heat collection efficiency; conversely, the lower the efficiency. [0003] Al-AlN absorbing coating is currently the most widely used and mature selective absorbing coating in China. It is mainly used on the heat collecting tube of the all-glass vacuum tube collector. When used below ℃, the absorption rate is greater than 92%, and the thermal emissivity is less than 8%. But when the working temperature is above 300°C, the thermal emissivity of this absorbing coating is close to 18%. However, the working temperature in the heat co...

Claims

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Application Information

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IPC IPC(8): C23C14/35C03C17/34F24J2/50
CPCY02E10/40
Inventor 陶维伟陆高林汤留庚
Owner 江苏亚邦太阳能有限公司
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