Method for controlling orientation and profile characteristic of zinc oxide nano-stick/nano-tube array
A nanotube array and nanorod technology, which is applied in the field of synthesizing ZnO nanorods/nanotube arrays, can solve the problems of poor uprightness of one-dimensional ZnO nanostructures, adverse effects of ZnO nanostructures, etc.
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Embodiment 1
[0045] (1) Prepare the seed layer precursor solution: dissolve zinc acetate and ethanolamine (0.3M) in equimolar amounts into ethanol; after fully stirring for 1 hour, seal and homogenize for 24 hours;
[0046] (2) Clean the deposition substrate: ultrasonically clean and dry the silicate glass substrate one by one with acetone, alcohol, and deionized water;
[0047] (3) Spin-coating precursor solution: place the deposition substrate on a homogenizer, add the prepared seed layer precursor solution dropwise, and spin-coat at a speed of 7500 rpm for 30s;
[0048] (4) Solvent evaporation: transfer the spin-coated substrate to a hot plate at 280° C. for 5 minutes;
[0049] (5) Transfer to a rapid annealing furnace, first pyrolyze at 300° C. for 10 minutes, and then perform rapid annealing at 500° C. for 5 minutes to obtain a ZnO seed layer. Its surface and cross-sectional morphology are as figure 1 As shown, the seed particles are distributed on the substrate as single particles ...
Embodiment 2
[0053] (1) Prepare the seed layer precursor solution: dissolve zinc acetate and ethanolamine (0.075M) in equimolar amounts into ethanol; after fully stirring for 1 hour, seal and homogenize for 24 hours;
[0054] (2) Clean the deposition substrate: ultrasonically clean and dry the monocrystalline silicon wafers one by one with acetone, alcohol, and deionized water;
[0055] (3) Spin-coating precursor solution: place the deposition substrate on a homogenizer, add the prepared seed layer precursor solution dropwise, and spin-coat at a speed of 3000 rpm for 30s;
[0056] (4) Solvent evaporation: transfer the spin-coated substrate to a hot plate at 280°C for 10 minutes;
[0057] (5) Transfer to a rapid annealing furnace, first treat at 300°C for 10 minutes, and then rapidly anneal at 500°C for 5 minutes. Figure 4 Middle P2 is the XRD spectrum of the obtained ZnO seed layer film. The seed layer is randomly oriented in (001), (100) and (101) directions;
[0058] (6) The randomly...
Embodiment 3
[0061] (1) Prepare the seed layer precursor solution: dissolve zinc acetate and ethanolamine (0.15M) in equimolar amounts into ethanol; after fully stirring for 1 hour, seal and homogenize for 24 hours;
[0062] (2) Clean the deposition substrate: ultrasonically clean and dry the monocrystalline silicon wafer substrate one by one with acetone, alcohol, and deionized water;
[0063] (3) Spin-coating precursor solution: place the deposition substrate on a homogenizer, add the prepared seed layer precursor solution dropwise, and spin-coat at a speed of 4500 rpm for 30s;
[0064] (4) Transfer the spin-coated substrate to a hot plate at 280° C. for 5 minutes;
[0065] (5) Transfer to a rapid annealing furnace, first pyrolyze at 300°C for 10 minutes, and then heat treat at 500°C and 650°C for 5 minutes respectively. Figure 5 FESEM images of the surface (a) and cross-section (b) of the obtained seed layer. It can be seen that after high temperature growth, the seed size increases ...
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