Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same

A supercapacitor and polypyrrole technology, which is applied in the direction of capacitors, electrolytic capacitors, and capacitor components, can solve the problems of reduced reliability of micro-energy devices, increased processing difficulty, and complicated preparation processes, so as to improve high-current discharge performance and increase The effect of energy density

Inactive Publication Date: 2008-12-17
TSINGHUA UNIV
View PDF1 Cites 31 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the number of layers increases, the preparation process becomes more complex, the processing difficulty increases significantly, and the reliability of the prepared micro-energy devices also decreases.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same
  • Poly-pyrrole minisize super capacitor based on MEMS technique and method for manufacturing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] The invention proposes a polypyrrole micro-supercapacitor based on MEMS technology and a manufacturing method thereof. The micro-supercapacitor is a two-dimensional comb-tooth planar structure consisting of an anode (positive electrode) and a cathode (negative electrode) covered with the same polypyrrole active material, filled with a gel-like solid electrolyte, and then sealed in a polyimide encapsulation layer In this paper, a polypyrrole micro-supercapacitor with the characteristics of small size, high energy storage density, high discharge power, simple structure, convenient processing, and reliable performance was obtained. The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0024] figure 1 Shown is a schematic diagram of a two-dimensional planar gold comb current collector for a micro-supercapacitor. In the figure, the comb structures of the anode gold current collector 1 and the cathode gold cur...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
strengthaaaaaaaaaa
Login to view more

Abstract

The invention discloses a polypyrrole minitype super capacitor in the range of the capacitor manufacturing technology based on MEMS technology and the preparation method thereof. The polypyrrole minitype super capacitor adopts the structure that a metal comb two-dimensional plane structure as a current collector is prepared on the surface of the silicon matrix by utilizing the micro-machining technology; a comb-shaped polypyrrole active electrode is prepared on the surface of the current collector by adopting the method of polypyrrole substance being prepared by the electric precipitation method; a layer of gel solid electrolyte is covered on the surface of the comb-shaped polypyrrole electrode and between a positive electrode and a negative electrode; and a layer of polyimide material is covered on the surface of the structure to accomplish the encapsulation of the minitype super capacitor. The MEMS-based manufacturing technology has the characteristic that the process is simple, and is suitable for mass manufacture. The minitype super capacitor has the advantages of small volume, high energy storage and stable performance, and is widely applicable to micro-robot electronic intelligence systems, chemical sensors, battlefield friend-or-foe identification devices, distributed type battlefield sensors and other fields.

Description

technical field [0001] The invention belongs to the technical scope of manufacturing microcapacitors, in particular to a polypyrrole microsupercapacitor based on MEMS technology and a manufacturing method thereof for microsystems. Background technique [0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can realize long-term, high-efficiency, multi-m...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): H01G9/042H01G9/048H01G9/025H01G9/08H01M10/00H01M14/00
CPCY02E60/13
Inventor 尤政王晓峰
Owner TSINGHUA UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap