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Layer-by-layer automatic forming method and device for micro photo-curing thick film

An automatic forming and light curing technology, applied in optics, opto-mechanical equipment, photo-engraving process coating equipment, etc., can solve the problems of inapplicability, high viscosity of thick glue, and inability to use thick film to form, and achieve good operability. , highly automated, compact effects

Inactive Publication Date: 2011-05-11
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the relevant process methods cannot be applied to the layer-by-layer molding of "liquid resin" required for multi-layer light scanning curing, and there is no discussion on the possibility of its application in "micro-light molding" technology.
[0005] According to "Research on the Fabrication Process of PMNT Ferroelectric Thin / Thick Film and Its MEMS Cooler" (Ph. Ph.D. dissertation in 2007) introduced that there are many methods for the preparation of ferroelectric thick films such as silicon-based lead zirconate titanate (PZT) widely used in the field of microfabrication, but the thickness of the thick film that can be obtained is generally in the range of several Micron level, it is difficult to reach tens of microns; although screen printing and tape casting technology can be used to obtain films with a thickness of tens of microns, it is mainly aimed at preparing PZT powder with PZT powder as the main body and adding organic solvents and other auxiliary materials. slurry, and has high requirements for raw materials, and there are many defects such as holes in the film after thick film forming. When it is necessary to obtain multi-layer thick film, after each layer is printed and formed, it needs to be dried and annealed, and then printed layer by layer
Therefore, it cannot be used in the layer-by-layer molding of "liquid resin", and the possibility of its application in "micro-light molding" technology has not been explored.
[0006] According to "Micro-Nano Processing Technology and Its Application" (edited by Cui Zheng, Higher Education Press, 2005), in the thick photolithography technology widely used in the field of micro-nano processing, the use of different rotating speeds The film thickness of several microns to tens of microns can be obtained, but due to the high viscosity of the thick film, under the action of centrifugal force, there is a large difference between the thickness of the film edge and the center of the film, and the uniformity of the film is poor. At the same time, due to the use of rotating and shaking the glue, it is difficult to achieve the precise coordinate relationship between the upper and lower layers after the multi-layer thick film is formed, and it cannot be used for the layer-by-layer light-cured thick film forming required by the micro-light forming method.

Method used

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  • Layer-by-layer automatic forming method and device for micro photo-curing thick film
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  • Layer-by-layer automatic forming method and device for micro photo-curing thick film

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Embodiment 1

[0027] Attached figure 1The schematic diagram is shown to develop and assemble the thick film layer-by-layer automatic forming device. First, set a support frame on a basic platform to install a vertical precision linear motion platform 1, and install a one-dimensional horizontal precision linear motion platform including a double-opening resin tank 2, a molding tank 5 and a set on the right side of the vertical precision linear motion platform 1. The integrated box-type platform of the motion platform 9, the extrusion sled 3 and the sliding stage 6 are respectively loaded into the first opening of the resin tank 2 and the forming groove 5, and the upper end of the extrusion sled 3 and the lower end of the sliding stage 6 are both The connecting rod is fixedly connected with the slider of the vertical precision linear motion platform 1 and can slide up and down with the slider. An adjustable high-linearity scraper 4 is installed on the slider beam of the horizontally arranged...

Embodiment 2

[0030] see figure 1 Among them, the vertical precision linear motion platform 1 is a commercially available electronically controlled precision linear motion platform with a stroke of 50mm and repeat positioning accuracy of ±1μm; the horizontal precision linear motion platform 9 has a stroke of 40mm, which is an electronically controlled precision linear motion platform that can realize stepless speed regulation The precision linear motion platform, the height-adjustable and highly linear scraper 4 with a length of 30mm set on the slider beam is made by using high-precision measurement and measurement of the blade ruler after hydrophobic treatment and remanufacturing, and the height of the scraper 4 can be adjusted And the adjustment of scraping speed to obtain high-precision thick film.

Embodiment 3

[0032] Attached figure 1 The thick film layer-by-layer automatic forming device assembled in the schematic diagram shown is applied in a micro-light curing forming system, as shown in the appendix of this manual. figure 2 A schematic diagram of a three-dimensional microstructure of a square cone that requires multi-layer superposition and solidification molding is given. When in use, the micro-smooth photo-curing molding system software initializes the extrusion sled 3, the sliding stage 6, and the scraper 4 to adjust to the original position, and determine The center of the molding groove 5 and the sliding stage 6 is the original center of the three-dimensional microstructure that needs to be formed by thick film and photocuring. According to the size of the largest planar figure of the microstructure to be processed, the lower left corner of the sliding stage 6 is used as the processing The mechanical origin of each layer of liquid resin film is selected as 20 microns in th...

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Abstract

The invention provides a micro-stereo lithography solidification thick-film layer-by-layer automatic molding method and a corresponding apparatus, belonging to the micro-stereo (quick) lithography molding and processing field. The apparatus comprises two precise linear movement platforms which can be conveniently controlled by a computer in an integrated manner, an integrated double-opening resintrough, a molding trough, a scraper and a position controller of the scraper. A sliding block of a vertical precise linear movement platform is fixedly connected with an upper extrusion sliding plug and a sliding object stage through a linkage; a high linearity scraper is arranged on a sliding-block beam of a horizontal precise linear movement platform; the integrated double-opening resin trough and the molding trough are respectively a two-opening liquid-resin trough provided with a communicated inner part and a comparative independent molding trough provided with a round opening; the scraper is provided with a linear knife-edge with better hydrophobic property and high linearity and the left-right end position controller of the scraper is arranged an integrated box-shaped platform; all the parts are arranged on a base platform and all the drive and control circuits are connected with a control box controlled by a computer. The invention has compact structure; a liquid-resin thick-film with high precision and even-thickness can be obtained by the invention; automatically adding the liquid-resin and molding the thick film layer by layer can be realized based on the computer control technique; a connection with the 'micro-stereo lithography' is also realized; the method and the apparatus have the advantages of high automation, integration and better operability.

Description

Technical field: [0001] The invention belongs to the technical field of micro-optical molding, and in particular relates to a method and a device for adding liquid resin layer by layer to automatically form a thick film for micro-processing. Background technique: [0002] According to pages 78-83 of the book "Light Shaping Method" published by Japan's Nikkan Industry News Agency in 1990, stereolithography (Stereo Lithography) (also known as rapid prototyping) technology was developed in the early 1980s. CAD / CAM technology, laser application technology and polymer functional material science are integrated, and it is a new technology that can quickly manufacture any complex three-dimensional. In the introduction of related technologies, the book gives a principle of "free liquid surface method", which is to obtain a certain thickness layer by layer by sinking the stage placed in the liquid resin and using the natural flow of the liquid resin Solidify the liquid layer; at the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/00G03F7/16
Inventor 王翔赵钢褚家如
Owner UNIV OF SCI & TECH OF CHINA