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Negative refraction artificial material based on iron-clad

A metal covering layer and artificial material technology, which is applied in the metal material coating process, the photoengraving process of the pattern surface, the coating and other directions to achieve the effects of simple production, low single-layer loss and great application prospects.

Active Publication Date: 2009-05-06
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
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Problems solved by technology

[0004] The problem to be solved by the present invention is to propose a method for realizing negative refraction and near-zero refraction in the visible light frequency band by using the electromagnetic properties of the metal coating layer on the grating in view of the shortcomings of the existing artificial composite materials for magnetic resonance.

Method used

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  • Negative refraction artificial material based on iron-clad
  • Negative refraction artificial material based on iron-clad
  • Negative refraction artificial material based on iron-clad

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Embodiment Construction

[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. But the following examples are limited to explain the present invention, and the protection scope of the present invention should include the whole content of claim, and through following embodiment, those skilled in the art can realize the whole content of claim of the present invention.

[0030] Such as figure 1 As shown, the production schematic diagram of the first step of the present embodiment, at first select the quartz substrate 1, and its surface is polished; 2 membrane2;

[0031] Such as figure 2 As shown, the production schematic diagram of the second step of the present embodiment, in high-purity SiO 2 The surface of the film is again vapor-deposited with a thickness of 30 nanometers of chromium film 3, and then evenly coated with a PMMA photoresist 4 with a thickness of 50 nanometers;

[0032] Such as image 3 As shown in the...

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Abstract

The invention relates to a negative refraction artificial material based on a metal covering layer, which comprises the following steps that (1) a quartz basal piece is selected, the surface of the quartz basal piece is polished, and then, a high-purity SiO2 film is evaporated and plated on the surface of the quartz basal piece; (2) the surface of a high-purity SiO2 film is evaporated and plated with a chrome film, and a layer of photoresist is evenly coated on the high-purity SiO2 film; (3) an electron beam photoetching method is adopted, and a medium grating structure is prepared on the photoresist; (4) a wet etching technology is adopted, the photoresist is used as a mask, and the exposed chrome film is etched; (5) a dry etching technology is adopted, the chrome film is used as the mask, the medium grating structure is etched on the high-purity SiO2 film, and the chrome film is removed; (6) a vacuum evaporation technology is adopted, a metal layer is evaporated and plated on the SiO2 grating structure, the thickness of the metal layer is h, and the negative refraction artificial material based on the metal covering layer is completely prepared. The invention has the advantages of convenient preparation, little single-layer consumption and signal-layer normal incidence and has a wide application prospect in the fields of magnetic resonance, near field optics, stealth materials, and the like.

Description

technical field [0001] The invention relates to the design and manufacture of an artificial composite structure material which utilizes the electromagnetic properties of the metal covering layer on the grating to realize negative refraction in the visible light frequency band and near-zero refraction characteristics. technical background [0002] The effective refractive index is an important parameter for the interaction between the material and the external electromagnetic field, and a requirement for the realization of effective negative or zero refractive index is the need for a negative effective magnetic permeability at the designed band or frequency point. At present, the existing The method is: the artificial composite material with negative magnetic permeability in the near-infrared band, especially in the visible light band, utilizes the periodically arranged nano-scale non-magnetic unit structure to form resonance with the external excitation electromagnetic wave, ...

Claims

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Application Information

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IPC IPC(8): G02B5/18G02B1/10G03F7/00C23C14/24C23C14/18
Inventor 罗先刚胡承刚赵泽宇陈旭南
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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