Negative refraction artificial material based on iron-clad
A metal covering layer and artificial material technology, which is applied in the metal material coating process, the photoengraving process of the pattern surface, the coating and other directions to achieve the effects of simple production, low single-layer loss and great application prospects.
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[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. But the following examples are limited to explain the present invention, and the protection scope of the present invention should include the whole content of claim, and through following embodiment, those skilled in the art can realize the whole content of claim of the present invention.
[0030] Such as figure 1 As shown, the production schematic diagram of the first step of the present embodiment, at first select the quartz substrate 1, and its surface is polished; 2 membrane2;
[0031] Such as figure 2 As shown, the production schematic diagram of the second step of the present embodiment, in high-purity SiO 2 The surface of the film is again vapor-deposited with a thickness of 30 nanometers of chromium film 3, and then evenly coated with a PMMA photoresist 4 with a thickness of 50 nanometers;
[0032] Such as image 3 As shown in the...
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