Erbium oxide hydrogen resistance coating and preparation thereof

An erbium oxide and coating technology, used in chemical instruments and methods, coatings, metal material coating processes, etc., can solve problems such as reducing stress and increasing bonding force, achieving good reliability, simple structure and process, and removal of Effects of unfavorable factors

Active Publication Date: 2009-07-01
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the downside is: Er 2 o 3 grown in Al 2 o 3 In fact, there is no transition layer like the Fe-Al

Method used

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  • Erbium oxide hydrogen resistance coating and preparation thereof
  • Erbium oxide hydrogen resistance coating and preparation thereof

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0029] Example 1 Preparation of metal transition layer by radio frequency magnetron sputtering method

[0030] The metal transition layer is prepared by radio frequency magnetron sputtering. First take CLAM as the matrix. Using ErFe with a diameter of 68mm 2 Target, the vacuum chamber is evacuated to 2.0×10 by mechanical pump and molecular pump in sequence -4 Pa. Then pass in 20sccm Ar gas, adjust the sputtering gas pressure to 0.5Pa, sputter with a radio frequency power of 100W, and the target base distance during sputtering is 55mm; when the substrate temperature is heated to 300℃, about 50 minutes of sputtering is obtained. 1μm ErFe 2 Transition layer.

Example Embodiment

[0031] Example 2 Preparation of Er by reactive RF magnetron sputtering 2 O 3 coating

[0032] Using pure Er target, using reactive RF magnetron sputtering to prepare ErFe 2 Preparation of Er on the substrate of the transition layer 2 O 3 coating. Using an Er target with a diameter of 68mm, the vacuum chamber is vacuumed to 2.0×10 with a mechanical pump and a molecular pump in sequence -4Pa. Then pass in 20sccm Ar gas and 2sccm O 2 For reactive sputtering; adjust the sputtering gas pressure to 0.2Pa, sputtering with a radio frequency power of 150W, during sputtering, the target base distance is 55mm, and the substrate heating temperature is 500℃. After 5 hours of sputtering, an Er of about 3μm is obtained. 2 O 3 coating.

[0033] The prepared hydrogen barrier coating structure is as figure 1 Shown. Among them, 1 is the base material; 2 is the metal transition layer prepared on the base material, in this case it is ErFe with a thickness of 1 μm 2 Layer; 3 is Er 2 O 3 The coating ha...

Example Embodiment

[0034] Example 3 Measuring the resistivity of erbium oxide hydrogen barrier coating

[0035] At room temperature, the surface of the sample prepared in Example 2 and the steel substrate were used as two poles, and different DC voltages were applied to measure the corresponding micro currents. The insulation resistance was measured by the ratio of voltage / current, and the thickness and cross-sectional area of ​​the sample were calculated. Convert the insulation resistivity.

[0036] Er measured 2 O 3 The relationship between the insulation voltage and current of the coating is shown in Table 1. Measuring electrode area 0.314cm 2 , The insulation resistivity is 5.02×10 under the converted voltage of 120V 13 Ωcm, you can see the prepared Er 2 O 3 The hydrogen barrier coating has high insulation resistivity.

[0037] Table 1

[0038] Voltage / V 60 70 80 90 100 110 120 Current / nA 0.040 0.053 0.09 0.12 0.12 0.23 0.25

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Abstract

The invention relates to a hydrogen resistant coating system and a preparation method thereof, in particular to a hydrogen resistant coating system containing Er2O3 and a preparation method thereof. The coating takes activated martensite steel or austenitic steel as a basal body on which Fe-Er is taken as a metal transition layer coated with Er2O3 coating. The preparation method comprises: preparing Fe-Er alloy on the basal body by a vapor phase deposition method, and preparing the Er2O3 layer on the metal transition layer by the vapor phase deposition method.

Description

technical field [0001] The present invention relates to a kind of hydrogen barrier coating and preparation method thereof, especially containing Er 2 o 3 Hydrogen barrier coating and its preparation method. Background technique [0002] Hydrogen-resistant coating materials are usually used in thermonuclear experimental reactors, and their role is to prevent tritium penetration, such as ensuring safe tritium levels in the environment and coolant in the liquid cladding system, preventing tritium from breeding agent to coolant, from Penetration into the environment from the pipeline. Its structure usually includes parts such as substrate and coating material. For the design requirements of hydrogen barrier and hydrogen isotope coating materials, it is necessary to meet the system operation requirements in the following aspects: good insulation resistivity, good hydrogen barrier performance, and good thermal expansion matching between the coating material itself and the subst...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/08C23C14/34C23C16/06C23C16/40C23C16/505B32B18/00B32B33/00
Inventor 李弢古宏伟汤梅杨旭东巨新
Owner GRIMAT ENG INST CO LTD
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