High transmittance conductive glass for touch screen and technique for producing the same

Abstract

The invention discloses a high-transmissivity conductive glass for a touch screen and a process for producing the same. The high-transmissivity conductive glass for the touch screen comprises a glass substrate; the surface of the glass substrate is sequentially provided with a silicon dioxide film plating layer and a tin indium oxide film plating layer; the silicon dioxide film plating layer is positioned in an inner layer; the tin indium oxide film plating layer is positioned in an outer layer; a niobium pentoxide film plating layer is arranged between the glass substrate and the silicon dioxide film plating layer; a process flow comprises that: the qualified glass substrate is selected and cleaned; the cleaned glass substrate is sent into a film plating machine; the surface of the glass substrate is subjected to film plating processing; a finished product plated with a film is taken out from the film plating machine; the finished product is subjected to performance detection; and the qualified finished product is packaged and enters a warehouse. The high-transmissivity conductive glass utilizes good insulation and stable refractive index of columbium pentoxide and silicon dioxide and can improve the visible light transmittance of the conductive glass to 94 percent above; and a reasonable process course is favorable for improving controllability of operation and stability of product quality and can meet requirement of large-batch production.

Description

technical field [0001] The invention relates to a coated conductive glass and a production process thereof, in particular to a high transmittance conductive glass for a touch screen and a production process thereof. Background technique [0002] Indium tin oxide conductive glass, that is, ITO conductive glass, especially ITO conductive glass deposited by planar magnetron sputtering technology, has been mainly used in liquid crystal panel glass and freezer coated glass in the liquid crystal display industry since the 1990s. The ITO conductive glass used for touch screen is the basic material of touch screen panel. It has higher requirements for surface resistance and transmittance than ITO conductive glass used for liquid crystal display. Usually, the surface resistance is required to be 150Ω / port, and the transmittance More than 89%, it is on ultra-thin float glass, in a high vacuum environment, using planar magnetron sputtering technology to deposit ITO nano-film on the gla...

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Problems solved by technology

[0002] Indium tin oxide conductive glass, that is, ITO conductive glass, especially ITO conductive glass deposited by planar magnetron sputtering technology, has been mainly used in liquid crystal panel glass and freezer coated glass in the liquid crystal display industry since the 1990s. The ITO conductive glass used for touch screen is the basic material of touch screen panel. It has higher requirements for surface resistance and transmittance than ITO conductive glass used for liquid crystal display. Usually, the surface resistance is required to be 150Ω / port, and the transmittance More than 89%, it is on ultra-thin float glass, in a high vacuum environment, using planar magnetron sputtering technology to deposit ITO nano-film on the glass surface, so as to obtain glass with high transmittance and good uniformity; and High transmittance glass was mainly used in the optical industry in the past. Under high vacuum conditions, thermal evaporation coating or laser gun bombardment coating is carried out on the glass. The application area of ​​the coating is small, and the materials used are generally magnesium fluoride, titanium dioxide, di Silicon oxide, etc., the film thickness is thicker, and the uniformity requirements are lower. Of course, due to the requirements of the application, this type of glass does not need to have an ITO conductive layer, but magnesium fluoride is a kind that cannot be completed by magnetron sputtering technology. The material conflicts with the ITO material. Titanium dioxide is also a material that is unstable in magnetron sputtering and the sputtering rate is too low, which is not conducive to large-scale and large-scale coatings. Therefore, to obtain conductive glass with high transmittance, it is necessary to To solve the optical problem of improving the transmittance, and to solve the matching problem between the dielectric layer and the ITO conductive layer, only the selection of the appropriate dielectric layer film and the thickness of the ITO conductive layer can help improve product performance

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