Electric tuning optical switch device
An optical switch and electrical tuning technology, applied in the direction of coupling of optical waveguides, to achieve the effects of easy fabrication, guaranteed coupling efficiency, and simple structure
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specific Embodiment 1
[0036] Take the planar 1×N optical splitter as an example. The Fluid Prism unit takes the form of a three-fluid (e.g. Figure 4 ), the conductive materials 9 and 12 on the left and right sides are Si, and a layer of 500nm SiO is oxidized on the surface of Si 2 as the insulating layer 13. The hydrophobic layer 14 is realized by dipping the hydrophobic agent FOTs. Conductive fluid 4 or 6 use saline solution,
[0037] But it may have freezing problem when used at low temperature. High concentration salt solutions can be used to lower the freezing point. In order to maintain the low density and refractive index of the brine, a low atomic weight salt is used: lithium chloride. Lithium chloride at a concentration of 20% results in a freezing point below -40°C, a density ρ of 1.12kg / m3, and a refractive index of 1.38. Insulating Fluid 5 uses a mixed phenylmethylsiloxane, which has a high refractive index and good electrowetting properties. Dissolve a few percent carbon tetrabr...
specific Embodiment 2
[0040] Take a planar N×N optical switch device as an example. The transparent substrate still uses a high-performance cover glass sputtered ITO film layer. The light input and output arrays are made of silicone rubber. The cavity storing the electrowetting prism material is coated with a conductive film, and the edges of the cavity are separated by insulating substances. The insulating layer is made of parylene with a thickness of 3 microns by vacuum coating. The hydrophobic layer is made of polytetrafluoroethylene polymer material (the English abbreviation is PTFE, and the trade name is Teflon). Teflon@AF) coating to achieve. The insulating fluid is bromododecane (density 1.0399, refractive index 1.4583), and the conductive fluid is saline solution with the same density to remove the influence of gravity. The voltage controls the shape of the interface between the insulating fluid and the conductive fluid to adjust the shape and position of the liquid prism, thereby adjus...
specific Embodiment 3
[0042] Take the three-dimensional M×M optical switch device as an example. Other manufacturing processes can adopt the method of embodiment 1 or embodiment 2 to carry out. If the cavity adopts a cylindrical structure, its electrode cross-section can be Figure 15 The 4-electrode structure or the 6-electrode structure in Figure 16.
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