Laser differential confocal spectrum microscopy tomography device
A differential confocal and tomographic imaging technology, applied in measurement devices, material excitation analysis, optics, etc., can solve problems such as poor geometric position detection ability, difficulty in accurately capturing focus O-excited Raman spectroscopy, diffraction limit limitation, etc. Achieve the effect of improving absolute measurement, micro-spectral and geometric position detection capabilities
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[0028] The present invention will be further described below with reference to the drawings and embodiments.
[0029] The technical principle of the present invention is: adopting the differential confocal microscopy imaging technology to arrange the confocal microscope receiving optical path into two detection optical paths before and after the focus, and the two intensity response signals with different phases detected by the two detectors are differentially The subtraction achieves the purpose of improving the axial resolution and improving the anti-interference ability. At the same time, the system includes a Raman spectrum analysis system, so that the system can simultaneously measure the material spectrum signal of the microscopic area of the sample, and can analyze the material composition of the sample; , The introduction of diffractive light shaping devices to limit the measurement beam and compress the focal depth of the system to achieve the purpose of improving the r...
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