Method for preparing three-dimensional manometer load-type catalyst
A supported catalyst, three-dimensional nanotechnology, applied in catalyst activation/preparation, chemical instruments and methods, physical/chemical process catalysts, etc., can solve problems such as small specific surface area, achieve simple preparation process, large action area, overcome dispersion poor sex effect
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Embodiment 1
[0033] (1) Prepare a layer of SiNx thin film on the glass substrate with a chemical vapor deposition method, with a thickness of 200-2000nm;
[0034] (2) The configured SiO 2 The nanosphere solution is evenly sprayed onto the glass substrate covered with SiNx film, and dried; ( figure 1 and Figure 4 )
[0035] (3) Using SiO 2 Nanospheres as a mask, through SiNx material and SiO 2 The different etching rates of the material, using the reactive ion etching method to etch out the nano-column; ( figure 2 and Figure 5)
[0036] (4) Preparation of TiO on the etched nanocolumn array by magnetron sputtering technology 2 catalyst;( image 3 and Figure 6 )
[0037] (5) Through the above steps, TiO is formed 2 The catalyst is fixedly supported on SiO 2 Nanocomposite structures on nanospheres and SiNx nanopillars.
Embodiment 2
[0039] (1) Utilize the sol method to prepare a solution containing organic nanospheres, spray it directly onto the glass substrate, and dry to form a uniformly arranged array;
[0040] (2) Using organic nanospheres as a mask, through the different etching rates of the organic nanospheres and the glass substrate, the nanocolumns are etched by the reactive ion etching method;
[0041] (3) Prepare TiO on the etched nanocolumn array by magnetron sputtering technology 2 catalyst;
[0042] (4) Through the above steps, TiO is formed 2 Inorganic-organic composite nanocatalysts in which catalysts are fixedly supported on organic nanospheres.
Embodiment 3
[0044] Step (4) in Example 1: Utilize magnetron sputtering technology to prepare TiO on the etched nano-column array 2 Catalyst, instead: utilize magnetron sputtering technology to prepare metal Ni catalyst on the nano-column array that etch out, other is the same as embodiment one, will form metal Ni catalyst and be fixedly supported on SiO 2 Nanocomposite structures on nanospheres and SiNx nanopillars.
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