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Microelectrode array chip sensor for electrochemical immunological detection

A chip sensor and immune detection technology, applied in the field of sensors, can solve problems such as affecting the reaction of the working electrode, and achieve the effects of enhancing stability, ensuring insulation performance, and improving signal-to-noise ratio.

Inactive Publication Date: 2009-12-23
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when the working electrode and the auxiliary electrode are in the same electrolytic cell, the reaction products on the side of the auxiliary electrode will seriously affect the reaction of the working electrode.

Method used

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  • Microelectrode array chip sensor for electrochemical immunological detection
  • Microelectrode array chip sensor for electrochemical immunological detection

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with the drawings and embodiments. The examples provide detailed implementation schemes and specific operation procedures under the technical premise of the scheme of the present invention, but the protection scope of the present invention is not limited to the examples.

[0031] 1. Thermally oxidize and grow 600nm silicon dioxide on a P-type silicon substrate as an insulating layer.

[0032] 2. Use piranha solution (H 2 SO 4 : H 2 O 2 =3:1) Clean the surface of silicon dioxide, clean with deionized water to remove impurities, and dry the silicon wafer; photolithography, using positive glue to form the working electrode pattern, the working electrode radius is 500 μm. Oxygen plasma sputtering base film.

[0033] 3. Sputtering PVD 20nm Ti and 300nm Au; use lift-off process to remove photoresist to form working electrode pattern, working electrode radius is 500μm.

[0034] 4. Photolithography, using positive ...

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Abstract

The invention belongs to the technical field of sensors, in particular to a microelectrode array chip sensor for electrochemical immunological detection. The invention uses silicon-based material to carry out manufacturing; and a chip integrates an electrochemical detected working electrode, an auxiliary electrode and a reference electrode, which has a good signal to noise ratio. The auxiliary electrode and the working electrode form a ring-disk structure, and the distance between the auxiliary electrode and the working electrode is small, thereby improving the sensitivity of the electrodes. The array distribution of a plurality of working electrodes can be used for multi-channel detection. The invention can be widely used for detection in various fields such as biological medicine and the like. The sensor is manufactured by using MEMS process, and has simple process and low cost.

Description

Technical field [0001] The invention belongs to the technical field of sensors, and specifically relates to a microelectrode integrated array chip sensor for electrochemical biological immune detection. Background technique [0002] The electrochemical detection method uses electrodes to convert the signals generated by the biochemical reactions of different substances into electrical signals, so as to determine the microscopic process and substance content reflected between the substances. According to the different principles of electrochemical detection, it can be divided into current method, potential method, conductance method and so on. Since the invention of the electrochemical method, through continuous development, a very good theoretical basis has been established for the study of the characteristics of the electrode and the solution interface. Electrochemical detection can be applied to analytes such as inorganic ions, organic ions, proteins, amino acids, DNA, etc. . T...

Claims

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Application Information

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IPC IPC(8): G01N27/27G01N27/30G01N33/53B81B7/02
Inventor 柴晓森徐春周嘉
Owner FUDAN UNIV
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