Microelectrode array chip sensor for electrochemical immunological detection

A chip sensor and immune detection technology, applied in the field of sensors, can solve problems such as affecting the reaction of the working electrode, and achieve the effects of enhancing stability, ensuring insulation performance, and improving signal-to-noise ratio.

Inactive Publication Date: 2009-12-23
FUDAN UNIV
View PDF5 Cites 31 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the working electrode and the auxiliary electrode are in the same electrolytic cell, the reactio

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Microelectrode array chip sensor for electrochemical immunological detection
  • Microelectrode array chip sensor for electrochemical immunological detection

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0030] The present invention will be further described below in conjunction with the drawings and embodiments. The examples provide detailed implementation schemes and specific operation procedures under the technical premise of the scheme of the present invention, but the protection scope of the present invention is not limited to the examples.

[0031] 1. Thermally oxidize and grow 600nm silicon dioxide on a P-type silicon substrate as an insulating layer.

[0032] 2. Use piranha solution (H 2 SO 4 : H 2 O 2 =3:1) Clean the surface of silicon dioxide, clean with deionized water to remove impurities, and dry the silicon wafer; photolithography, using positive glue to form the working electrode pattern, the working electrode radius is 500 μm. Oxygen plasma sputtering base film.

[0033] 3. Sputtering PVD 20nm Ti and 300nm Au; use lift-off process to remove photoresist to form working electrode pattern, working electrode radius is 500μm.

[0034] 4. Photolithography, using positive ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Radiusaaaaaaaaaa
Radiusaaaaaaaaaa
Login to view more

Abstract

The invention belongs to the technical field of sensors, in particular to a microelectrode array chip sensor for electrochemical immunological detection. The invention uses silicon-based material to carry out manufacturing; and a chip integrates an electrochemical detected working electrode, an auxiliary electrode and a reference electrode, which has a good signal to noise ratio. The auxiliary electrode and the working electrode form a ring-disk structure, and the distance between the auxiliary electrode and the working electrode is small, thereby improving the sensitivity of the electrodes. The array distribution of a plurality of working electrodes can be used for multi-channel detection. The invention can be widely used for detection in various fields such as biological medicine and the like. The sensor is manufactured by using MEMS process, and has simple process and low cost.

Description

Technical field [0001] The invention belongs to the technical field of sensors, and specifically relates to a microelectrode integrated array chip sensor for electrochemical biological immune detection. Background technique [0002] The electrochemical detection method uses electrodes to convert the signals generated by the biochemical reactions of different substances into electrical signals, so as to determine the microscopic process and substance content reflected between the substances. According to the different principles of electrochemical detection, it can be divided into current method, potential method, conductance method and so on. Since the invention of the electrochemical method, through continuous development, a very good theoretical basis has been established for the study of the characteristics of the electrode and the solution interface. Electrochemical detection can be applied to analytes such as inorganic ions, organic ions, proteins, amino acids, DNA, etc. . T...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N27/27G01N27/30G01N33/53B81B7/02
Inventor 柴晓森徐春周嘉
Owner FUDAN UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap