Method for making micro-nano-scale speckle

Abstract

The invention discloses a method for making a micro-nano-scale speckle and belongs to the technical field of optical measurement mechanics. The method has the technical characteristics that: the micro-nano-scale speckle is made under the environment of a mature commodity instrument, namely a focused ion beam system. The method can directly etch on the surface of a test piece without a mask or photoresist or temperature requirement, can be performed at normal temperature, and has simple operation. By comparing image sub-area gray gradient squares, selecting the optimized simulated speckle pattern, and changing the amplification factor of the focused ion beam system, the dimension and area of the speckle can be controlled. The speckle appearance can be changed by changing the beam intensity and etching time. The made speckle is applied to the research of micro-nano deformational behaviors of different materials.

Description

technical field [0001] The invention relates to a method for making micro-nano-scale speckles, and belongs to the technical field of photomechanics. Background technique [0002] With the continuous advancement of micro-processing technology, the size of devices is getting smaller and smaller, and the deformation measurement of tiny devices such as MEMS systems requires the development of micro-nano mechanical experimental methods. The digital speckle correlation method has the advantages of non-contact, full-field measurement and high sensitivity. Combining with high-resolution equipment, it can measure deformation at the micro-nano scale, but requires that the surface of the specimen must have a clearly identifiable micro-nano speckle pattern. [0003] At present, the commonly used speckle production methods are mostly artificial speckle production methods, such as spray paint method. The speckle particles obtained by this method are relatively large and can be identified ...

AI Technical Summary

Problems solved by technology

[0003] At present, the commonly used speckle production methods are mostly artificial speckle production methods, such as spray paint method. The speckle particles obtained by this method are relatively large and can be identified by naked eyes. Microscopic deformation measurement and deformation measurement requirements of microscopic specimens (such as MEMS)

S A Collette et al. (S A Collette, M A Sutton, P Miney, etc., Nanotechnology 15 (2004) 1812-1817) developed a speckle fabrication method that can be used for nanoscale strain measurement. First, a gold film was coated on the surface of a porous alumina plate. Then press the plate into the polymer test piece, dissolve the aluminum oxide plate so that the gold film remains on the surface of the test piece, but this method is only suitable for polymer materials that can be softened, the scope of application is small, and it is difficult to control speckle size of

W.A.Scrivens et al. (W.A.Scrivens & Y.Luo & M.A.Sutton et al., Experimental Mechanics (2007) 47:63-77) developed two speckle fabrication methods that can be used for micro-nano scale strain measurement, one is chemical vapor deposition method to make nano-scale speckles, and the other is to make micron-scale speckles by ultraviolet lithography. developing, fixing and other steps, and both are not easy to quantitatively adjust the size of the speckle

Patent 200810101918.X proposes a method of producing high-temperature micron-scale speckles by electron beam exposure. This method includes steps such as coating, glue removal, exposure, development, and fixation. Although the size and area of ​​speckles can be controlled, the production process is cumbersome and complicated.

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