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Method for forming protective film

A manufacturing method and technology of a protective film, applied to the field of forming a dense layer on an anodic oxide film of aluminum, which can solve problems such as insufficient corrosion resistance, and achieve the effects of improved corrosion resistance and uniform film thickness

Active Publication Date: 2012-07-04
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, even if the sealing treatment is performed by this method, a boehmite layer exhibiting high corrosion resistance cannot be formed with good reproducibility, and the corrosion resistance is insufficient.

Method used

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  • Method for forming protective film
  • Method for forming protective film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0052]Use an aluminum alloy plate (A5052P, refer to JISH4000) with a width of 30 mm, a length of 45 mm, and a thickness of 2 mm as a substrate. As a pretreatment for forming an anodic oxide film, the substrate is immersed in 10% sodium hydroxide aqueous solution at 40°C for 1 minute, and then degreased. Thereafter, it was washed with water and immersed in a 35% sulfuric acid aqueous solution at room temperature to remove smut (black deposits).

[0053] The substrate after the previous treatment is used as the object of treatment, using an electrolyte solution obtained by dissolving 30g of oxalic acid in 1 liter of pure water, the oxidation temperature is 15°C to 25°C, and the oxidation voltage is 60V to 100V. and the film thickness of the anodized film 12 are formed under the conditions shown in Table 1 below,

[0054] [Table 1]

[0055] Table 1: First heat treatment conditions

[0056]

[0057] Using the object 11 on which the anodized film 12 was formed, the first heat ...

Embodiment 5

[0097] Example 5 and Comparative Example 3 are as described in the above-mentioned Table 2. When forming the anodic oxide film 12, the first half is made at a low current density and the second half is at a high current density. , the pore (pore) size of the anodized film is increased, and the film thickness of the non-pore wall part is also thickened, so that the structure of the anodized film is changed in the film thickness direction.

[0098] However, comparing Tables 6 and 7 with the above-mentioned Table 2, it is found that even if the structure of the anodized film is changed, there is no great difference in the film thickness of the dense layer after the first and second heat treatments. Therefore, it can be seen that the present invention can form a dense layer regardless of the conditions at the time of forming the anodic oxide film or the structure of the anodic oxide film.

[0099] When the electrolytic solution is changed from an oxalic acid aqueous solution to a ...

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Abstract

Disclosed is a method for forming a protective film having high corrosion resistance. The method comprises bringing warm water (46) having a temperature of 70 DEG C or above and 90 DEG C or below (first temperature) into contact with an anode oxide film (12) to form a discontinuous face on the surface of the anode oxide film (12) and then bringing hot water having a second temperature, which is above the first temperature, or a water vapor having the second temperature into contact with the film. The hot water or the water vapor is introduced through the surface of the anode oxide film (12) into the inside of the anode oxide film (12). Accordingly, voids on the surface portion in the anode oxide film (12) are clogged by a hydrate formed upon the contact of the voids with the hot water or the water vapor. Therefore, a protective film formed of a dense layer can be reliably formed on the surface of the anode oxide film (12).

Description

technical field [0001] The present invention relates to a method for producing a protective film of an aluminum material, in particular to a method for forming a dense layer (protective film) on an anodic oxidation film of aluminum. Background technique [0002] Aluminum and aluminum alloys are lighter than stainless steel, have excellent thermal conductivity, and are not affected by heavy metal contamination such as chromium, so they are widely used as inner wall members of vacuum tanks in vacuum processing equipment. [0003] At present, anodic oxidation treatment called alumite treatment is widely used for corrosion resistance treatment of aluminum and aluminum alloy. [0004] However, high corrosion resistance is required for vacuum processing equipment, especially equipment using reactive gas, its plasma, or radicals (CVD equipment, etching equipment, etc.), so conventional anodizing treatment is not sufficient. [0005] In the anodizing treatment, an aqueous solution ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D11/18
CPCC25D11/246
Inventor S·稻吉石榑文昭
Owner ULVAC INC