Silicon nano-wire biological sensor for detecting pesticide residues

A technology for biosensors and pesticide residues, applied in the field of silicon nanowire biosensors, can solve the problems that the detection limit of biosensors cannot meet the requirements, and achieve the effects of compatible manufacturing processes, reduced manufacturing costs, and large specific surface area

Inactive Publication Date: 2010-11-24
FUDAN UNIV
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Problems solved by technology

[0005] In addition, the detection limit of the biosensors currently used for the detection of various pesticide residues can not meet the requirements, and the best detection limit can reach 10. －6 order of magnitude, and the detection limit in traditional laboratories can even reach 10 －9 As people have higher and higher requirements for environmental detection sensitivity, how to develop biosensors with higher sensitivity is of great significance

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  • Silicon nano-wire biological sensor for detecting pesticide residues
  • Silicon nano-wire biological sensor for detecting pesticide residues
  • Silicon nano-wire biological sensor for detecting pesticide residues

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Embodiment Construction

[0033]The fabrication process of silicon nanowire-based nanobiosensors is described in detail below. Using the silicon oxide buried layer 5 on insulator as the substrate, use 40-keV electron beam etching method and dry etching method to etch silicon nanowires 2 of tens to hundreds of nanometers on the silicon substrate material, and then Deposit a thin layer of silicon oxide film on the surface of the silicon substrate, spin-coat the electron beam photoresist on the surface of this layer of silicon oxide, and then remove the photoresist at the reserved places of the source electrode 3 and the drain electrode 7, The ion beam implantation method is used to dope the As ions, and the carriers are activated by rapid thermal annealing under the nitrogen atmosphere, so as to complete the re-doping of the source 3 and the drain 7 . Boron is doped on the back of the silicon substrate to form the gate 6, and then an alloy is deposited on the source 3, drain 7 and gate 6 regions by ion s...

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Abstract

The invention belongs to the technical field of analysis detection, in particular to a silicon nano-wire biological sensor for detecting pesticide residues. The sensor uses a field effect tube FET, which uses a silicon nano-wire as a channel and is provided with a back gate structure, as a converter, and uses acetylcholinesterase (or butyrylcholine esterase) as a biosensing element to realize high-sensitivity detection on pesticides; and the pesticides include organophosphorus pesticides and carbamates pesticides. Because the silicon nano-wire with the larger specific surface area is very sensitive to the change response to the channel surface charge, the sensor can realize high-sensitivity detection on the organophosphorus pesticides and the carbamates pesticides. In addition, the silicon nano-wire field effect tube is prepared by using a large-scale integrated circuit process and can be produced on large scale and in batch, so the cost of single sensor is reduced.

Description

technical field [0001] The invention belongs to the technical field of analysis and detection, and in particular relates to a silicon nanowire biosensor for highly sensitive detection of pesticide residues. To be precise, it is a field effect tube biosensor with silicon nanowires as the channel, which is used for the detection of organophosphorus pesticides and carbamate pesticides. Background technique [0002] Organophosphorus pesticides and carbamate pesticides have a broad spectrum of killing insects and are cheap. They are widely used in agriculture and other fields, and play an important role in inhibiting the occurrence of crop diseases and insect pests. However, with the long-term and widespread use of such pesticides, people began to pay attention to the potential harm of pesticide residues to the human body and the ecological environment, and incidents such as health damage, ecological deterioration, and food pollution caused by pesticides frequently occurred. On ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/414H01L29/772
CPCG01N27/4145
Inventor 陈国平郭红斌仇志军刘冉
Owner FUDAN UNIV
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