Ion plating device
A technology of ion coating and ion source, which is applied in the field of ion coating devices, can solve the problems of poor coating uniformity and short service life of ion sources, etc., and achieve uniform coating, good compactness, and enhanced film strength.
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[0017] Example 1
[0018] like figure 1 As shown, in the ion coating device of the present invention, the preferred solution is that the coating furnace 1 is a cylinder, and the coating furnace is provided with an ion source 3, a film material 2, and an ion source 3 and an ion source power supply located outside the coating furnace 1. 4 are connected, ion source power supply 4 anode voltage 200-380V, anode current 8-20A, what is passed into the coating furnace 1 is the mixed gas of oxygen and argon whose volume ratio is 1: 2, and the gas flow rate is 30sccm (standard ml / minutes), the ion source 3 can coat 42-68 layers of film, and a coating umbrella 5 is provided on the upper part of the coating furnace 1 . The ion source 3 emits plasma, heats the film material 2, and makes it into film material vapor, which is uniformly coated on the glass sheet or lens, and the glass sheet or lens is arranged in the coating umbrella 5. Glass sheet refers to the filter used for mobile phon...
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