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Process for homogenizing aluminum alloy

A process method and homogenization technology, which is applied in the field of heat treatment of non-ferrous metals, can solve problems such as uneven matrix structure, achieve the effect of short holding time and improve efficiency

Inactive Publication Date: 2011-05-11
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to aim at the inhomogeneous matrix structure of the high-quality 6061 aluminum alloy used for the reaction chamber lining of the plasma etching machine, and coarse skeletal Si-Mg-rich phases and Fe-containing phases are distributed on the grain boundaries, and To solve the problem of coarse phase size (>10 microns), a homogenization process method is provided to make the matrix structure of high-quality 6061 aluminum alloy relatively uniform, so as to obtain better aluminum alloy matrix material

Method used

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  • Process for homogenizing aluminum alloy
  • Process for homogenizing aluminum alloy
  • Process for homogenizing aluminum alloy

Examples

Experimental program
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Effect test

Embodiment 1

[0025] High-quality 6061 aluminum alloy for the lining of the reaction chamber of the plasma etching machine, the alloy composition is as follows: Si0.50wt%, Mg0.93wt%, Cu0.23wt%, Cr0.18wt%, Fe<0.14wt%, Mn0.036wt% %, Ti<0.15wt%, Al balance. The alloy contains less Fe as an impurity, and also contains Cr and Mn. Smelting and casting are carried out according to the following steps and processes.

[0026] The casting process is electromagnetic casting, the mold pulling speed is 700r / min, the cooling water pressure is 0.07MPa, the pouring temperature is 760°C, the stirrer current is 70A, the stirrer frequency is 15Hz, and the argon gas is passed for 5 minutes to degas and remove slag, 720 ℃ plus 0.1wt% Al 3 After Ti refiner, let stand for 20min to pour. The 6061 aluminum alloy ingot with qualified composition without casting defect was produced by electromagnetic casting.

[0027] The 6061 aluminum alloy obtained above is subjected to a homogenization heat treatment process: ...

Embodiment 2

[0035] High-quality 6061 aluminum alloy used for the lining of the reaction chamber of the plasma etching machine, the alloy composition is as follows: Si0.40wt%, Mg1.2wt%, Cu0.15wt%, Cr0.35wt%, Fe<0.14wt%, Mn0.13wt% %, Ti<0.15wt%, Al balance. Melting and casting were carried out according to the steps and process of Example 1 to obtain a 6061 aluminum alloy ingot with qualified composition without casting defects.

[0036] The 6061 aluminum alloy obtained above is subjected to a homogenization heat treatment process: the aluminum alloy ingot is heated with the furnace, kept at 560°C ± 5°C for 9 hours, and then quenched with water at room temperature after being taken out of the furnace, and the transfer time does not exceed 1 minute.

Embodiment 3

[0038]High-quality 6061 aluminum alloy for the lining of the reaction chamber of the plasma etching machine, the alloy composition is as follows: Si0.60wt%, Mg0.8wt%, Cu0.4wt%, Cr0.04wt%, Fe<0.15wt%, Mn0.06wt% %, Ti<0.15wt%, Al balance. Melting and casting were carried out according to the steps and process of Example 1 to obtain a 6061 aluminum alloy ingot with qualified composition without casting defects.

[0039] The 6061 aluminum alloy obtained above is subjected to a homogenization heat treatment process: the aluminum alloy ingot is heated with the furnace, kept at 560°C±5°C for 9 hours, and then quenched with water at room temperature after being taken out of the furnace, and the transfer time does not exceed 1 minute.

[0040] For the 6061 aluminum alloys of Examples 2 and 3, after homogenizing heat treatment, the microstructure uniformity of the aluminum alloy matrix is ​​improved, and the Mg 2 The re-dissolution of the Si phase makes the iron-containing phase sphero...

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Abstract

The invention relates to a process for homogenizing aluminum alloy, in particular to a process for homogenizing high-quality 6061 aluminum alloy for a reaction chamber liner of a plasma etcher, belonging to the technical field of non-ferrous metal heat treatment technique. The 6061 aluminum alloy comprises 0.4-0.6 wt% of Si, 0.8-1.2 wt% of Mg, 0.15-0.4 wt% of Cu, 0.01-0.35 wt% of Cr, less than 0.15 wt% of Fe, less than 0.15 wt% of Mn, less than 0.15 wt% of Ti and the balance of Al. The process provided by the invention comprises the following steps: carrying out furnace-heating on 6061 aluminum alloy cast ingots, keeping the temperature at 560+ / -5 DEG C for 9 hours, discharging, and carrying out water quenching at room temperature. The homogenizing treatment can enhance the structural homogenity of the aluminum alloy matrix, redissolve the Mg2Si phase, and nodulize the iron-containing phase, thereby enhancing the effect of anodic oxidation and the corrosion resistance of aluminum alloy after anodic oxidation.

Description

technical field [0001] The invention relates to an aluminum alloy homogenization process method, in particular to a high-quality 6061 aluminum alloy homogenization process method for the reaction chamber lining of a plasma etching machine, and belongs to the technical field of nonferrous metal heat treatment processes. Background technique [0002] The semiconductor equipment industry has extremely strict requirements on aluminum alloy materials. For example, the lining of the reaction chamber used in the etching machine will be bombarded and corroded by high-density plasma during the working process. Corrosion of strong corrosive media such as hydrobromic acid, hydrofluoric acid, nitric acid and ammonia water. Therefore, aluminum alloy parts must be subjected to strict surface treatment to form a high-performance dense oxide film, and one of the key factors determining the quality of the oxide film is the microstructure and properties of the aluminum alloy base material. ...

Claims

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Application Information

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IPC IPC(8): C22F1/04C22C21/08C22F1/047B22D21/04B22D27/02C22C1/06C23F1/08
Inventor 汤振雷闫晓东许小静杜鹏
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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