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Three-dimensional metallic nickel nano tapered body array structure and preparation method thereof

An array structure, three-dimensional nanotechnology, applied in the field of materials, achieves the effects of easy operation, simple control, and simple process flow

Active Publication Date: 2013-03-06
浙江科冠智能装备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there are few reports on 3D graded nanoarrays of Ni

Method used

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  • Three-dimensional metallic nickel nano tapered body array structure and preparation method thereof
  • Three-dimensional metallic nickel nano tapered body array structure and preparation method thereof
  • Three-dimensional metallic nickel nano tapered body array structure and preparation method thereof

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preparation example Construction

[0032] The preparation process of the three-dimensional metallic nickel nanoscale gradient array structure is roughly as follows:

[0033] 1. The prepared three-dimensional gradient template is sputtered with a layer of conductive layer, and the three-dimensional gradient nanostructure template is composed of nano-protrusions or porous structures of three-dimensional gradient bodies of different materials;

[0034] II. Put the template with conductive layer into the nickel-containing electrolyte, adjust the electrolyte, electrolyte temperature, electrolyte pH, oxidation voltage, deposit nickel on the template by electrodeposition or electroless deposition, and remove the template , to obtain a three-dimensional graded nickel nanoarray.

[0035] Generally speaking, in the preceding step II:

[0036] If the nickel nanogradient structure is a hollow structure, it is fully filled by electrodeposition in an acidic electrolyte containing nickel by using a three-dimensional gradient...

Embodiment 1

[0046] Embodiment 1 (preparation of hollow nickel cone)

[0047] Sputter a layer on the surface of the tapered alumina template with aluminum base (see "Optimization of antireflection structures of polymer based on nanoimprinting using anodic porous alumina", "Journal of Vacuum Science and Technology B", 2007, 26, 1856-1859) The 20nm thick Au layer is placed in a mixed solution containing 100g / L-300g / L nickel sulfate hexahydrate, 10g / L-40g / L nickel chloride hexahydrate and 5g / L-30g / L boric acid, The deposition adopts a three-electrode system, with alumina as the working electrode, platinum sheet as the counter electrode, and Ag / AgCl as the reference electrode. The experiment was carried out in a water bath at 10°C to 80°C. Apply a voltage of -0.5V to -10V and react for 3h. Take out the sample, dissolve the alumina template in 1mol / L~10mol / L sodium hydroxide solution, collect the dissolved solid, wash it several times with secondary water, and dry it in an oven for 1 hour to ...

Embodiment 2

[0048] Embodiment 2 (preparation of nickel taper hole)

[0049] A 20nm thick Au layer was sputtered on the surface of a PMMA cone nanostructure (see "Antireflection polymer surface using anodic porous aluminum molds with tapered holes", "Chemistry Letters", 2007, 19, 530-531) as a template, and a layer containing In a mixture of 100g / L~300g / L nickel sulfate hexahydrate, 10g / L~40g / L nickel chloride hexahydrate, and 5g / L~30g / L boric acid, the deposition adopts a three-electrode system, and the alumina is Working electrode, platinum sheet as counter electrode, Ag / AgCl as reference electrode. The experiment was carried out in a water bath at 10°C to 80°C. Apply a voltage of -0.5V to -3V and react for 3h. Take out the sample, dissolve the PMMA template in the carbon tetrachloride solution of 2mol / L~5mol / L, collect the dissolved solid, wash several times with secondary water, dry in oven for 1h, and obtain the nickel cone structure (see image 3 -C). PMMA is a three-dimensional ...

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Abstract

The invention discloses a three-dimensional metallic nickel nano tapered body array structure and a preparation method thereof. The nano tapered body array structure consists of a plurality of nano tapered body units of which the sizes are changed linearly or nonlinearly, nano tapered body unit arrays are distributed on a substrate and can be any one or more of solid-projection, hollow-projection, porous and tubular structures, the axis of each nano tapered body unit is vertical to the substrate. The preparation method comprises the following steps of: forming at least one conductive layer on a template of a three-dimensional nano tapered array structure; placing the template in acidic electrolyte containing nickel salt, regulating reaction conditions so that nickel deposits on the template; removing the template to obtain a target product. According to the invention, the preparation process has simple flow, equipment is simple and easy to get, and the preparation process is compatible with the traditional electrochemical technology, has low cost and is convenient to regulate and control; in addition, the generated target product has order and diverse shape, adjustable size in a large range and wide application prospects in a magnetic storage medium template, biological sensing and monitoring fields and the like.

Description

field of invention [0001] The invention relates to a three-dimensional nano-array structure and a preparation process thereof in the technical field of materials, in particular to a three-dimensional metallic nickel nano-gradient array structure and a preparation method thereof. Background technique [0002] Due to its unique physical and chemical properties, the three-dimensional nanogradient array structure has broad application prospects in the fields of superhydrophobicity, surface-enhanced plasmon effect, anti-reflection, and optoelectronics. At present, based on traditional nano-fabrication techniques, such as reactive ion beam etching, plasma beam etching, photolithography, etc., three-dimensional nano-gradient protrusion structures have been prepared on the surface of inorganic semiconductor materials such as single crystal silicon and polycrystalline silicon. But these methods are not suitable for the preparation of three-dimensional graded nanostructures of metals,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/02C30B29/66C25D3/12C23C18/32B82Y30/00B82Y40/00
Inventor 高雪峰李丛珊李娟朱洁
Owner 浙江科冠智能装备有限公司