Composite getter for maintaining medium and low vacuum environment and preparation method thereof

Abstract

A composite getter for maintaining medium and low vacuum environment comprises an elemental metal powder getter (3), an alloy powder getter (2), a drying agent powder (1) and a plastic film (4), wherein the elemental metal powder getter (3) and the alloy powder getter (2) are present respectively as one layer and stacked in the center position of the drying agent powder (1) to form a core-clad structure, which is packed in the plastic film (4). The elemental metal powder getter (3) is one or a combination of at least two selected from the group consisting of reduced iron powder, nickel powder and copper powder with a grain size range from 10 to 200 µm. The alloy powder getter (2) is one or a combination of at least two selected from the group consisting of strontium-lithium alloy powder, barium-lithium alloy powder and barium-magnesium alloy powder with a grain size range from 50 to 500 µm. The drying agent powder (1) is one or a combination of at least two selected from the group consisting of calcium oxide powder, strontium oxide powder and barium oxide powder with a grain size range from 20 to 200 µm. The plastic film (4) is breakable automatically under a pressure difference of one atmosphere. The performance properties of this composite getter is not affected when exposed to air for a short period of time. The method for producing the composite getter is also disclosed.

Description

technical field [0001] The invention relates to a getter capable of effectively adsorbing gas molecules and water vapor without high-temperature activation and a preparation method thereof. Background technique [0002] The getter mainly uses adsorption to absorb the residual gas retained by the vacuum device during or after mechanical exhaust. Increase and maintain the vacuum within the device. In order to ensure a good vacuum state in the vacuum device, prolong the service life and improve the reliability. Traditional getters need to be evaporated or activated above 400°C to achieve the purpose of getting inhaled. With the development of science and technology, for medium and low vacuum environments between 0.01Pa-100Pa, some vacuum devices containing plastics and other materials that are not allowed to be heated have appeared. If the traditional getter is used in the device, the traditional getter cannot be activated by heating to achieve the purpose of gettering. [...

AI Technical Summary

Problems solved by technology

The disadvantage of this getter device is that the metal container blocks most of the external area of ​​the getter device, the effective area is small and the cost is increased, and the process is relatively complicated

The getter of the getter device is an uncompressed powder mixture. The gas adsorbed in the getter device exposed to the air is difficult to extract during the packaging process of the VIP, and there is a long time after the VIP is sealed. The degassing process has a great negative impact on the vacuum inside the VIP

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