Double sensitive layer gas sensor with nanofiber and particle adhesion layer and preparation method

A gas sensor and nanofiber layer technology, which is applied in coatings, instruments, scientific instruments, etc., can solve the problems of reducing sensitivity, fiber shrinkage, loss, etc., achieves improved sensitivity and response recovery, is easy to mass produce, and has a simple manufacturing process Effect

Inactive Publication Date: 2011-12-14
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] One obstacle of nanofibers in the sensor fabrication process is the poor adhesion between nanofibers and signal electrodes. Unstable contact, while the calcination of nanofibers during the synthesis process will lead to fiber shrinkage, these factors lead to a reduction in the contact ability between the fibers and the electrode, so that the electrical signal generated by the reaction of the fiber surface with the gas occurs during the transmission to the electrode. loss
The currently reported way to solve this problem is hot pressing, that is, to press the fiber at a certain high temperature to improve the contact ability with the electrode, but this method will destroy the fiber morphology, make the fiber break and reduce the sensitivity.
[0006] On the other hand, nanofibers will naturally form a network structure on the sensor substrate. Although this structure is conducive to the adsorption and desorption of gases, the mesh size is usually between tens of square micrometers and several square millimeters, so that the lining Many areas on the bottom are not covered by sensitive materials, which undoubtedly reduces the effective area of ​​the sensor

Method used

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  • Double sensitive layer gas sensor with nanofiber and particle adhesion layer and preparation method
  • Double sensitive layer gas sensor with nanofiber and particle adhesion layer and preparation method
  • Double sensitive layer gas sensor with nanofiber and particle adhesion layer and preparation method

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Experimental program
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Effect test

Embodiment 1

[0035] 1. On a double-sided polished oriented silicon wafer 1 (thickness 0.4mm), deposit SiO with a thickness of 400nm on both sides of the silicon wafer 1 at 300°C by PECVD method 2 Lower insulating layer 2 and upper insulating layer 3;

[0036] 2. Using the Pt target as the sputtering source, under the conditions of power 120W, Ar gas ambient pressure 1Pa, and substrate 300°C, sputter for 2 hours to obtain a Pt layer with a thickness of 100nm on the lower surface of the lower insulating layer 2 as a heating electrode layer;

[0037] 3. Using the Pt target as the sputtering source, under the conditions of 120W power, Ar gas ambient pressure 1Pa, and substrate 300°C, sputter for 2h to obtain a Pt layer with a thickness of 100nm on the upper surface of the upper insulating layer 3 as the signal electrode layer ;

[0038] 4. Apply GP18 photoresist (Chengdu Spectrum Optoelectronics Technology Co., Ltd.) on the heating electrode layer, spin the glue at 2400 rpm, and pre-bake at 60...

Embodiment 2

[0048] 1. Same as example 1;

[0049] 2. Same as example 1;

[0050] 3. Same as example 1;

[0051] 4. Apply GP18 photoresist on the heating electrode layer, spin the glue at 2400 rpm, and pre-bake at 60°C for 30 minutes. image 3 The mask plate with the structure shown is exposed to ultraviolet light for 15s, then developed and baked at 150°C for 1h, so that the unexposed photoresist forms a heating electrode protective layer 8 on the heating electrode layer;

[0052] 5. Same as example 1;

[0053] 6. Same as Example 1, the obtained annular heating electrode 4 has a width of 0.25mm, a length of about 160mm, and a resistance value of about 21Ω;

[0054] 7. Same as example 1;

[0055] 8. Deposition of TiO on the signal electrode 5 by magnetron sputtering 2 Particle adhesion layer 6, using TiO 2 The target is used as the source, under the conditions of power 110W, Ar gas ambient pressure 1Pa, and substrate 100°C, sputter for 30min to obtain TiO with a thickness of 100nm 2...

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Abstract

The invention belongs to the technical field of gas sensors and particularly relates to a gas sensor with a double-sensitive-layer structure consisting of a nano fiber and a particle adhesion layer, and a preparation method of the gas sensor. The gas sensor consists of a heating electrode, a lower insulation layer, a silicon slice, an upper insulation layer, a signal electrode, the particle adhesion layer, a nano fiber sensitive layer, a heating electrode lead wire and a signal electrode lead wire which are arranged sequentially from bottom to top, wherein the particle adhesion layer and the nano fiber sensitive layer are made from metal oxide gas sensitive materials of the same kind; and the particle adhesion layer is prepared by deposition of a magnetron sputtering method and the nano fiber sensitive layer is prepared by adopting an electrostatic spinning method. The invention mainly has the advantages that: the preparation process for the gas sensor is simple, for magnetron sputtering is only needed for one time; the gas sensor can be produced in bulk, for the particle adhesion layer can be deposited on hundreds of sensors at one time; and the sensitivity is improved remarkably, and the sensitivity and the response recovery speed of the sensor are improved greatly after a particle material layer is manufactured.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a gas sensor with a double sensitive layer structure composed of nanofibers and particle adhesion layers and a preparation method. Background technique [0002] Gas sensor is a type of sensor with wide application and large consumption. It plays an important role in product quality management, environmental monitoring and monitoring, plant cultivation, household appliances, pharmaceutical manufacturing and other fields. , air conditioning, national defense, scientific research and other fields occupy an important position. Generally, the gas sensor pursues in terms of performance: high sensitivity, high detection accuracy; fast response recovery, short detection time; simple manufacturing process, easy mass production, simple conversion circuit, and low cost. During the development of gas sensors, chemical sensors based on metal oxide gas-sensitive materials have gradually a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00B81C1/00
Inventor 李国栋漆奇赵君王培培
Owner JILIN UNIV
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