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Preparation of cylindrical large-area coating target material and method by plasma spraying

A plasma and cylindrical technology, which is applied in the field of ion spraying to prepare cylindrical large-area coating targets, can solve problems such as not being able to meet large-area coatings, not being able to produce large-size targets, and not satisfying large-area coatings, etc. Achieve the effect of simple structure, reliable performance and dense film layer

Active Publication Date: 2011-12-21
GEMCH MATERIAL TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Large-area coating is mainly used in glass coating, solar photovoltaic and other fields, including low-emissivity (Low-E) glass coating, transparent conductive glass coating (TCO), large-area coating, especially large-area glass coating, the commonly used targets are Large-size cylindrical targets, and the cylindrical target is required to be a single piece as a whole, or to be fixed on the same liner in sections. According to the current technical conditions, the length of the cylindrical target generally does not exceed 4 meters. This kind of cylindrical coated target is currently manufactured. The methods include: hot isostatic pressing method, sintering method, extrusion method and casting method. The above four processes have their own advantages and disadvantages. It is worth pointing out that none of them can meet the needs of large-area coating applications. , specifically, among them, the hot isostatic pressing method cannot be used to produce large-sized targets. It has been recorded that the length of the target material produced by this method cannot exceed 2 meters; the sintering method can only produce a length of 500 mm. The single target within the range; the two methods of extrusion and casting also have many limiting factors, such as the inability to be applied to the manufacture of non-metallic targets
[0007] It can be seen that under the current technical conditions, the length requirement can only be achieved by fixing it on the liner through multi-joint connections. This method undoubtedly greatly increases the cost. Large-area coating, especially the requirements of architectural glass coating on the target
[0008] In addition, there are few new related technical solutions that have been disclosed, such as patent application number 200310105218, a magnetron sputtering target that can improve target utilization

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0021] The preparation method includes 4 steps, namely preparation of spraying powder, substrate preparation, bonding layer spraying, and plasma spraying molding; specifically including:

[0022] 1) Spraying powder preparation: Weigh one or more target materials with a purity of not less than 99wt% by weight, fully grind them, sieve them, and spray granulate to obtain spraying powders;

[0023] 2) Substrate preparation: prepare a liner and perform surface treatment on the liner;

[0024] 3) Bonding layer spraying: For the liner after the surface treatment in 2), a layer of bonding layer is formed on the surface of the liner by arc spraying;

[0025] 4) Plasma spraying forming: put the spraying powder prepared in 1) into the plasma spraying powder feeder, install the liner after the bonding layer has been formed in 3) on the plasma spraying transmission equipment, during the spraying process, keep The relative movement between the liner wall and the thermal spray gun sets the ...

Embodiment 1

[0034] Example 1: Preparation of a titanium oxide cylindrical target;

[0035] Titanium oxide powder with a purity of 99.9wt% was mechanically ball milled for 5 hours, sieved with 250 mesh, and finally sprayed and granulated to obtain a thermal spray powder with good fluidity; a stainless steel tube was prepared as a liner, and the liner was 2244 mm long , with an inner diameter of 125 mm and an outer diameter of 133 mm. The outer wall of the liner is sandblasted, and the length of the sprayed area is 2244 mm. After removing the surface dirt and oxide layer, arc spraying is used to form a 0.2 mm thick nickel-aluminum bonding layer on the surface of the liner; The liner is fixed on the plasma spraying equipment, the titanium oxide spraying powder is loaded into the powder feeder of the thermal spraying equipment, the transmission device and the thermal spraying equipment are started, the speed of the liner is 100 rpm, and the moving speed of the spray gun is 1 m / min. The distan...

Embodiment 2

[0037] Example 2: Silicon-aluminum cylindrical target:

[0038] The silicon powder and aluminum powder with a purity of 4N, that is, a content ≥99.99%, wherein the weight ratio of silicon powder and aluminum powder is 9:1, are fully mixed, passed through a 200-mesh sieve, sprayed and granulated, and have good fluidity for spraying powder; Select a stainless steel liner, sandblast the liner, remove the surface dirt and oxide layer, and then form a 0.2 mm thick bonding layer on the liner by arc spraying; the inner diameter of the liner is 125 mm, the outer diameter is 133 mm, and the length 3855 mm, the length of the spraying area is 3812 mm; fix the liner on the spraying equipment, start the transmission device, the speed of the liner is 100 rpm, the moving speed of the spray gun is 0.8 m / min, the distance between the spray gun and the liner is 200 mm, and the silicon aluminum Put the powder into the powder feeder of the plasma thermal spraying equipment, start the thermal spra...

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PUM

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Abstract

The invention relates to a cylindrical large-area film coating target prepared through plasma spray coating and a method. The preparation method comprises four steps: spray coating powder preparation, substrate preparation, combining layer spray coating and plasma spray coating forming. Single metal and non-metal materials or various metal or non-metal materials are formed into a monomer target with the thickness through being sprayed and coated on a lining pipe, the process applicability is high, and simultaneously, the requirements of targets of various materials and various length dimensions can be met. The target has the advantages that the structure is simple, the performance is reliable, the utilization rate of the target can be obviously improved, the layer surface quality is good,the film layer is compact, and the target is widely applied to industrial fields such as building and automobile glass large-area film coating, solar photovoltaic photothermal, surface decoration andfunction film coating, plane display, optical light communication and optical storage, magnetic data storage, semiconductors and the like.

Description

technical field [0001] The present invention relates to international classification C23C coating of metal materials, coating of materials with metal materials, surface diffusion method, chemical conversion or replacement method of metal material surface treatment, vacuum evaporation method, sputtering method, ion implantation method or chemical vapor deposition General coating and other related technologies of the method, especially a cylindrical large-area coating target material and method prepared by plasma spraying. Background technique [0002] At present, sputtering coating is a technology that uses energetic particles to bombard the target surface in a vacuum, so that the bombarded particles are deposited on the substrate. Typically, a low-pressure noble gas glow discharge is used to generate incident ions. The cathode target is made of coating material, the substrate is used as the anode, and 0.1-10Pa of argon or other inert gas is introduced into the vacuum chambe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C4/16C23C4/08C23C4/10C23C14/34C23C4/11C23C4/131C23C4/134
Inventor 庄志杰
Owner GEMCH MATERIAL TECH SUZHOU
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