A kind of micro generator and its preparation method

A generator and micro technology, applied in the field of microelectronics, can solve the problems of low energy conversion efficiency, limited application environment, narrow working bandwidth, etc., and achieve the effects of light weight, broad application prospects, and improved output power

Inactive Publication Date: 2011-12-21
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantages of this structure include: 1) The operating bandwidth is relatively narrow, and higher energy can only be picked up at the resonance frequency, while the vibration frequency bandwidth of the surrounding environment is generally very wide, so the energy conversion efficiency is low
2) The reson

Method used

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  • A kind of micro generator and its preparation method
  • A kind of micro generator and its preparation method
  • A kind of micro generator and its preparation method

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Experimental program
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Effect test

Embodiment

[0044] Embodiment, preparation miniature ball is the SiO of bearing 2 / Si 3 N 4 Composite film electret micro generator

[0045] The technological process of preparing the micro-generator is as follows:

[0046] 1) Collecting electrode structure

[0047] a. Take a single crystal silicon wafer (N(100), double-polished silicon wafer, thickness 400 μm) as the substrate 1 of the collector electrode structure, thermally oxidize to form 300 nm of silicon dioxide, and deposit 110 nm of silicon nitride, photolithography , using reactive ion etching (RIE) dry etching of Si 3 N 4 and SiO 2 , silicon dioxide and silicon nitride double-layer film structure as an insulating layer and etching mask layer 2, see Figure 3 (a).

[0048] b. Lithograph and sputter metal electrodes Cr / Au15nm / 150nm on the insulating layer and corrosion mask layer 2, and use lift-off technology to obtain metal electrodes 3. The width of each finger of the electrode is 2mm, and the length is 20mm. The spacing...

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Abstract

The invention provides a miniature generator which comprises an electrode collection structure, an electret structure and micro-balls used as bearings arranged between the electrode collection structure and the electret structure, wherein the electrode collection structure comprises a substrate, a plurality of metal electrode pairs arranged on the substrate and insulated with the substrate, and a deep slot arranged on the substrate and vertically distributed with the metal electrode pairs; the electret structure comprises a substrate, electret strips arranged on the substrate and distributed in parallel at intervals in strip shapes, and a deep slot arranged on the substrate and vertically distributed with the electret strips; the deep slot on the electrode collection structure and the deep slot on the electret structure are arranged oppositely; the micro-balls are arranged in the opposite deep slots; and the electret strips are parallel to the electrode strips. In the invention, the micro-balls are used as bearing supports, and the space between the metal electrode and the electret can be controlled through the depth or the width of the slot, thus, the output power of the miniature generator can be favorably increased.

Description

technical field [0001] The invention relates to the technical field of microelectronics, and relates to an electret type micro generator and a preparation method thereof. Background technique [0002] Micro-Electro-Mechanical Systems (hereinafter referred to as MEMS) technology is based on the design and manufacturing technology in the micron / nano scale, integrating micro-sensors, micro-actuators and signal processing / control circuits to interfaces, communications and power supplies. Modules or systems have broad application prospects in the fields of biomedicine, national defense, precision instruments, and micro-robots. MEMS can complete tasks that traditional electromechanical systems are difficult to complete in the range of micron / nanoscale, making it possible to miniaturize various systems, and raising their automation, intelligence and reliability to a new level. The service life of a MEMS system does not entirely depend on the life and reliability of each component,...

Claims

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Application Information

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IPC IPC(8): H02K57/00B81C1/00B81C3/00
Inventor 张锦文杨兆辉王靖
Owner PEKING UNIV
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