Hydrogen sensitive material for optical fiber hydrogen sensor and preparation method of hydrogen sensitive material

Abstract

The invention discloses a hydrogen sensitive material for an optical fiber hydrogen sensor and a preparation method of the hydrogen sensitive material. The thin film material, namely the hydrogen sensitive material comprises a substrate and an alloy thin film, wherein the substrate is made of a metal, a semiconductor or an insulator material; the alloy thin film material comprises the basis components Pd and Y and has the chemical composition of Pd[1-x-y]Y[x]alpha[y], wherein alpha represents any one of Pt, Ag, Au, Ni, Cu, Al, Li and B, or at least one of La, Ru, Ce, Pr, Nd and Pm; x is more than 0 and is less than or equal to 0.3; and y is more than or equal to 0 and is less than or equal to 0.3. The alloy thin film material has the thickness of 2 to 1,000nm. The preparation method comprises the following steps of: firstly, prefabricating an alloy target by using an induction smelting or powder metallurgy method; then preparing the alloy thin film material on the substrate by a physical gas phase laminating method; or directly carrying out multitarget co-sputtering lamination on the substrate material by utilizing a plurality of pure targets to prepare the alloy thin film material. The optical fiber hydrogen sensor has the characteristics of strong anti-interference capability, high safety and high reliability and can be widely used for various conditions in which the hydrogen leakage needs to be detected.

Description

technical field [0001] The invention relates to a hydrogen sensor, in particular to a hydrogen sensitive material for an optical fiber hydrogen sensor and a preparation method thereof. Background technique [0002] As a clean and efficient renewable energy source, hydrogen has been widely used in the booster devices of aircraft, vehicles and ships, and is known as the pillar of the energy system in the 21st century. In addition to the energy field, hydrogen is also widely used in the fields of high-purity silicon crystal production, hydrogen-containing chemical products production, glass production, petroleum refining, metal welding, cryogenic cooling and chemical synthesis. However, hydrogen itself is a flammable and explosive gas. Under normal temperature and pressure, when the hydrogen content in the air is between 4% and 74.5%, it may cause an explosion accident and threaten personal and property safety. Therefore, the leakage detection of hydrogen in the process of pro...

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Problems solved by technology

However, the response time of this membrane is slow, about 3 minutes, and the signal sensitivity is very low. When 4% hydrogen is introduced, the refractive index changes by only 5 / 1000 [Donato Luna-Moreno, David Monzon-Hernandez, Joel Villatoro , et al.Opotical fiber hydrogen senor based on core diameter mismatch and annealed Pd-Au thin films, Sensors and Actuators B, 2007, 125:66-71], which limits its application in high-precision hydrogen sensors

The palladium / tungsten trioxide composite film has strong anti-interference ability such as water vapor, but there are also drift and hydrogen embrittlement [Minghong Yang, Yan Sun, Dongsheng Zhang, et al. Using Pd / WO3 composite thin films as sensing materials for optical fiber hydrogen sensors, Sensors and Actuators B, 2010, 143(2): 750-753]

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