Microfluidic device used in micron-grade particle high-flux separation, and manufacturing method thereof

Abstract

The invention discloses a microfluidic device used in micron-grade particle high-flux separation, and a manufacturing method thereof. On the device, separating substrates and a functional substrate are sequentially stacked; a sample inlet communicates with a main separation runner; terminals of branched runners respectively communicate with separation outlets, sample outlets and the main separation runner; a sample outlet of each layer of separating substrate is stacked and sealed-connected with a sample inlet of a next-layer separating substrate. During a manufacturing process, micro runners on each layer of separating substrate are manufactured with a micro processing technology; through holes provided on each layer of separating substrate are adopted as particle inlets; stacking of the separating substrates are realized through aligning markers and a bonding technology; through holes are provided on bonded separating substrates, and are adopted as particle outlets; the functional substrate and the packed multiple layers of separating substrates are bonded and packaged. According to the micro-runner structure provided by the invention, the current velocity of an injected sample is improved, and a low Reynolds number concept of traditional microfluidic chips is broken through. High-flux and continuum dimension separation of micron-grade biological particles is realized with a micro-fluidic inertia effect.

Description

technical field [0001] The invention relates to a microfluidic device based on the microfluidic inertial effect and a manufacturing method thereof, in particular to a microfluidic device for high-throughput sorting of micron-sized particles and a manufacturing method thereof. Background technique [0002] Microfluidic technology, as a new technology to realize fluid sample or micro-nano particle detection, analysis, manipulation, synthesis and other functions at the micro-nano scale, has been widely used in clinical medicine due to its advantages of small size, low cost and less sample consumption. , biochemical analysis, biology and other research fields of detection and analysis applications. It has become an important enabling technology in microfluidic research to replace expensive traditional cabinet-type diagnostic analysis equipment and realize the efficient transportation, sorting, extraction, assembly and mixing of micro-nano materials. How to realize the efficient...

AI Technical Summary

Problems solved by technology

The current micro-scale separation technology can be briefly summarized into the following categories according to its mechanism: the first type is microporous membrane filtration technology evolved from macro-filtration technology or micro-sieve separation technology based on barrier and cross-flow structure, but This type of technology has problems such as poor versatility, high cost, and easy clogging of the microstructure; the second type is single-field or multi-field composite separation technology based on electricity, sound, magnetism, light, and external fluids, but this type of technology generally has external field Defects such as energy consumption, difficulty in integration, miniaturization, and damage to micro-nano biological materials; the third category is sorting or extraction technologies based on complex microstructures such as micro-pillar arrays, wall V-grooves, and shrink-expansion arrays, but such technologies still exist. Complicated processing technology and poor versatility

In addition to the problems and limitations of the above three categories of technologies, due to the low flow rate in most microfluidic chips (the Reynolds number is generally 10 -6 ~10 1 ) and batch-based inefficient processing methods, the throughput is greatly limited, and it cannot meet the processing needs of large-volume samples such as plasma extraction and rare cell sorting.

In addition, most of the current microfluidic sorting chips can only achieve the separation of particles of two sizes

In order to overcome this limitation, some recent studies use the functional integration of planar multi-sorting units to realize the sequential sorting of multi-size particles, but this type of technology increases the size of the chip to a large extent, which is not conducive to the integration and miniaturization of the chip.

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