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Rare earth polishing material and preparation method thereof

The technology of rare earth polishing and rare earth polishing powder is applied in the field of rare earth polishing materials and their preparation, and can solve the problems of complex compounding process of fluoride and oxide, high true density of rare earth polishing powder, easy precipitation of polishing powder and the like.

Inactive Publication Date: 2012-07-18
上海华明高纳稀土新材料有限公司
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  • Abstract
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Problems solved by technology

Rare earth fluoride particles are relatively fine, and the post-treatment process is complicated; at the same time, the mixing process of fluoride and oxide is also relatively complicated; this method will cause the phenomenon of secondary sintering of particles, and some particles will grow abnormally after secondary roasting, forming Localized coarse particles that cause scratches during polishing
[0011] At the same time, the true density of the rare earth polishing powder is relatively high, which makes the polishing powder easy to precipitate during use, resulting in a low utilization rate of the polishing powder

Method used

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  • Rare earth polishing material and preparation method thereof
  • Rare earth polishing material and preparation method thereof
  • Rare earth polishing material and preparation method thereof

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preparation example Construction

[0042] On the other hand, the preparation method of rare earth polishing material of the present invention, it comprises the steps:

[0043] (1) Preparation of rare earth polishing powder:

[0044] Fluorination: mix rare earth carbonate with water, heat to 30-50°C, add a certain amount of 20% hydrofluoric acid solution dropwise under stirring conditions, add 10-15% ammonium bicarbonate aqueous solution to adjust to The pH is 6.5-7, heated to 70-90°C, and kept for 5-10h to obtain partially fluorinated rare earth carbonate slurry;

[0045] Dehydration and drying: After dehydrating the partially fluorinated rare earth carbonate slurry, dry it at 120-200°C for 10-20h;

[0046] Roasting: Roast the above product at 950-1100°C for 4-6 hours to obtain rare earth oxyfluoride;

[0047] Pulverization and classification: The obtained rare earth oxyfluoride is pulverized and classified to obtain the median diameter D 50: 0.8-3.0μm rare earth polishing powder;

[0048] (2) Preparation o...

Embodiment 1

[0054] Mix 1000kg of lanthanum cerium carbonate with 1000kg of water, heat to 30°C, add 80kg of 20% hydrofluoric acid dropwise, heat to 70°C after the dropwise addition, and keep warm for 10h to obtain partially fluorinated lanthanum cerium carbonate slurry; The partially fluorinated lanthanum cerium carbonate slurry was dehydrated by centrifugation, dried at 200°C for 10h, and calcined at 1100°C for 4h. Then it is pulverized and classified by airflow to obtain rare earth polishing powder. Tested by laser particle size analyzer, product D 50 =0.81μm, XRD results see figure 1 .

[0055] Fully mix 98 parts of rare earth polishing powder, 1 part of polyacrylic acid, 1 part of microcrystalline cellulose, and 0.05 part of sodium bicarbonate to obtain the rare earth polishing material.

Embodiment 2

[0057] Mix 1000kg of lanthanum cerium carbonate with 1000kg of water, heat to 50°C, add 160kg of 20% hydrofluoric acid dropwise, heat to 90°C after the dropwise addition, and keep warm for 5 hours to obtain partially fluorinated lanthanum cerium carbonate slurry; The obtained partially fluorinated lanthanum-cerium-praseodymium carbonate slurry was centrifuged and dehydrated, dried at 120°C for 20 hours, and calcined at 950°C for 6 hours; then crushed and classified by airflow to obtain rare earth polishing powder. Tested by laser particle size analyzer, product D 50 =2.98μm, XRD results see figure 2 .

[0058] Fully mix 65 parts of rare earth polishing powder, 5 parts of polyacrylic acid, 10 parts of agar gum, 15 parts of guar gum, 5 parts of ara gum, and 0.3 part of sodium carbonate to obtain the rare earth polishing material.

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Abstract

The invention aims to disclose a rare earth polishing material and a preparation method thereof. The rare earth polishing material comprises the following components by weight part: 65 to 98 parts of rare earth polishing powder, 1 to 5 parts of dispersant, 5 to 30 parts of suspension, and 0.05 to 0.3 part of pH regulator. Compared with the conventional product, the invention has the advantages as follows: the polishing powder is a crystalline homogeneous solid solution composed of oxyfluoride rare earth and cubic phase rare earth oxide; the suspension property of the prepared rare earth polishing material is good, and the polishing powder product is good in wear resistance, high in polishing speed and easy to control in polishing accuracy; and the product is good in homogeneity, high in production efficiency and low in cost, is free from contamination, and is applicable to surface polishing of precise devices in the electronic information industry, such as integrated circuits, two-dimensional displays and optical glass, so as to achieve the purposes of the invention.

Description

technical field [0001] The invention relates to a rare earth polishing material and a preparation method thereof, in particular to a cerium-based mixed rare earth polishing material suitable for surface polishing of precision devices in the electronic information industry such as integrated circuits, flat displays and optical glasses, and a preparation method thereof. Background technique [0002] At present, various glass materials are widely used, and these materials need to undergo necessary surface polishing before being applied. In the early days, materials such as zirconia, iron oxide or silicon dioxide were mainly used to polish various glass surfaces. In recent years, considering the polishing efficiency and precision, polishing materials with rare earth oxides (especially cerium oxide) as the main component have been used. It is considered more suitable for surface polishing of glass materials. [0003] With the rapid development of electronic information technolog...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02
Inventor 赵月昌杨筱琼尹先升蒙素玲赵秀娟贾嘉
Owner 上海华明高纳稀土新材料有限公司
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