Manufacturing method of hollow nanotube structure

A manufacturing method and nanotube technology, applied in nanotechnology, microstructure technology, microstructure devices, etc., can solve the problems of complex and time-consuming process technology, inability to directly form nanotube structures, and affecting the optoelectronic properties of components.

Inactive Publication Date: 2012-08-01
NAT CHENG KUNG UNIV
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Problems solved by technology

However, due to the high cost of required equipment and the extremely complicated and time-consuming process technology involved in the conventional process, the production cost of hollow nanotubes is relatively high.
Furthermore, most of the conventional process methods must be carried out under high temperature environment, but this high temperature condition will greatly limit the development of process applications in the manufacture of MEMS components th

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  • Manufacturing method of hollow nanotube structure
  • Manufacturing method of hollow nanotube structure
  • Manufacturing method of hollow nanotube structure

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Embodiment Construction

[0031] In order to make the above and other objects, features, and advantages of the present invention more comprehensible, preferred embodiments of the present invention will be exemplified below in detail with accompanying drawings.

[0032] The invention relates to a manufacturing method of a hollow nanotube structure, which mainly utilizes a nanowire and an outer coating layer to produce a hollow nanotube (nanotube) structure with various unique physical and chemical properties, so that the hollow nanotube (nanotube) structure can be passed through the hollow nanotube Structural design of micro-electromechanical elements and sensing elements with various functions, for example, hollow nanotube structures can be used as light waveguide materials to supply various optoelectronic elements, such as photo detectors, solar cells ( Solar cell), Liquid Crystal Display (LCD) and Light Emitting Diode (LED), etc., so it has great business opportunities and application potential in the...

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Abstract

The invention discloses a manufacturing method of a hollow nanotube structure, comprising the following steps: preparing a substrate; forming a crystal seed layer on the substrate first, then generating a nanowire with a predetermined dimension on the crystal seed layer at relatively low temperature by using hydrothermal method; forming an outer coating layer on the surface of the nanowire; selectively etching the top of the outer coating layer to expose the top of the nanowire; and removing the whole nanowire and keeping the hollow outer coating layer to form a plurality of hollow nanotubes. The method is beneficial to simplify the nanotube technology, improve the dimension precision of the nanotubes and improve the photoelectric properties of elements.

Description

technical field [0001] The invention relates to a manufacturing method of a hollow nanotube structure, in particular to a manufacturing method of forming a hollow nanotube structure by using a nanowire and an outer cladding layer. Background technique [0002] Nowadays, in order to meet the needs of micro-electromechanical components and sensing components, researchers continue to develop and improve various nanostructures, and apply suitable insulating materials (such as oxides), semiconductor materials or conductive materials to manufacture various nanowires (nanowire) or hollow nanotube (nanotube) structure, for example: using silicon dioxide SiO 2 , titanium dioxide TiO 2 , zinc oxide ZnO, indium phosphide InP, silicon Si, gallium nitride GaN, nickel Ni, platinum Pt or gold Au and other nanomaterials to make metal nanowires; on the other hand, carbon or silicon dioxide is also used to make hollow wires. nanotubes. The aforementioned nanowire or hollow nanotube structu...

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Application Information

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IPC IPC(8): B81C1/00B82Y40/00
Inventor 王水进郭德明蔡维志曾志荏
Owner NAT CHENG KUNG UNIV
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