CVD (Chemical Vapor Deposition) SiC/SiO2 gradient antioxidant composite coating and preparation method thereof

A composite coating and gradient coating technology, applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve the problem of not providing long-term anti-oxidation protection, slow SiC oxidation rate, and inability to form oxygen barrier films and other problems, to achieve good controllability and designability, excellent anti-oxidation performance, and low stress.

Active Publication Date: 2014-11-05
CENT SOUTH UNIV
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AI Technical Summary

Problems solved by technology

However, in the medium and low temperature region, the oxidation rate of SiC is very slow, and it is impossible to form complete and effective SiO 2 Oxygen barrier film
However, coatings such as borate glass and phosphate glass, which have good fluidity and wettability in the medium and low temperature region, will fail due to severe volatilization under long-term high-temperature conditions.
Therefore, the anti-oxidation temperature of these coatings is narrow, only concentrated in the middle and low temperature section or high temperature section, and cannot provide long-term anti-oxidation protection in a wide temperature range from low temperature to high temperature

Method used

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  • CVD (Chemical Vapor Deposition) SiC/SiO2 gradient antioxidant composite coating and preparation method thereof
  • CVD (Chemical Vapor Deposition) SiC/SiO2 gradient antioxidant composite coating and preparation method thereof
  • CVD (Chemical Vapor Deposition) SiC/SiO2 gradient antioxidant composite coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] SiC / SiC~SiO 2 / SiO 2 Preparation of composite coating

[0037] After the graphite substrate was polished with No. 600 SiC sandpaper, it was cleaned with distilled water and absolute ethanol in sequence, and then dried in an oven at 100°C for 12 hours before use.

[0038] (1) Preparation of SiC coating

[0039] Place the surface-treated graphite substrate in a chemical vapor deposition furnace with CH 3 SiCl 3 -H 2 -Ar system preparation, where CH 3 SiCl 3 (MTS) is the Si source, the water bath maintains a constant temperature of 30-35 °C, and the H 2 Bubble the carrier gas into the CVD furnace. The deposition temperature is 1100° C., the deposition pressure is 700 Pa, and the deposition time is 1 h.

[0040] (2) SiC~SiO 2 Coating preparation

[0041] Keep the process parameters and process conditions in step (1), feed carbon dioxide gas, and keep the CO 2 / H 2 The flow ratio is 0.47, the deposition time is 10h, and SiC~SiO is prepared by deposition 2 coati...

Embodiment 2

[0047] SiC / SiC-SiO 2 / SiO 2 Preparation of composite coating

[0048] After the base material was polished with No. 600 SiC sandpaper, it was ultrasonically cleaned with distilled water and absolute ethanol in turn, and then dried in an oven at 100°C for 12 hours before use.

[0049] (1) Preparation of SiC coating

[0050] Place the surface-treated substrate material in a chemical vapor deposition furnace with CH 3 SiCl 3 -H 2 -Ar system preparation, where CH 3 SiCl 3 (MTS) was the Si source, the water bath was kept at a constant temperature of 34.5 °C, and the H 2 Bubble the carrier gas into the CVD furnace. The deposition temperature is 900°C, the deposition pressure is 10kPa, and the deposition time is 10h.

[0051] (2) SiC-SiO 2 Coating Preparation

[0052] Keep the process parameters and process conditions in step (1), feed carbon dioxide gas, and gradually reduce the CO 2 / H 2 The flow ratio was increased from 0.32 to 1.28, the deposition time was 10h, and S...

Embodiment 3

[0057] SiC / SiC-SiO 2 / SiC~SiO 2 / SiC-SiO 2 / SiO 2 Preparation of composite coating

[0058] After the base material was polished with No. 600 SiC sandpaper, it was ultrasonically cleaned with distilled water and absolute ethanol in turn, and then dried in an oven at 100°C for 12 hours before use.

[0059] (1) Preparation of SiC coating

[0060] Place the surface-treated substrate material in a chemical vapor deposition furnace with CH 3 SiCl 3 -H 2 -Ar system preparation, where CH 3 SiCl 3 (MTS) was the Si source, the water bath was kept at a constant temperature of 30.5 °C, and the H 2 Bubble the carrier gas into the CVD furnace. The deposition temperature is 1300° C., the deposition pressure is 700 Pa, and the deposition time is 4 hours.

[0061] (2) SiC-SiO 2 Coating Preparation

[0062] Keep the process parameters and process conditions in step (1), feed carbon dioxide gas, and gradually reduce the CO 2 / H 2 The flow ratio was changed from 1.28 to 0.32, the ...

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Abstract

The invention discloses a CVD SiC / SiO2 gradient antioxidant composite coating and a preparation method thereof. The CVD (Chemical Vapor Deposition) SiC / SiO2 gradient antioxidant composite coating is mainly used for long-time antioxidant protection of graphite, a C / C composite material and an easily oxidized ceramic-based material (such as a C / C-ceramic composite material, C / ceramic composite material, carbide ceramics and the like). The coating is prepared by adopting a chemical vapor deposition (CVD) method and has good controllability and designability. The coating comprises a SiC coating, a SiO2 coating and a SiC and a SiO2 co-deposition coating. The coating is formed by a gradient or is a multilayer composite gradient coating which is formed by multiple gradients; the multilayer composite gradient coating is sequentially SiC / SiC-SiO2 / SiO2 coating from inside to outside, or sequentially SiC / SiC-SiO2 / SiC-SiO2 / SiC-SiO2 / SiO2 coating, or sequentially SiC / SiC-SiO2 / SiO2 / SiO2-SiC / SiC / SiC-SiO2 / SiO2......SiC / SiC-SiO2 / SiO2, or SiC / SiC- SiO2 / SiO2-SiC / SiC-SiO2 / ...... / SiO2-SiC / SiC-SiO2 / SiO2, or SiC / SiC-SiO2 / SiC-SiO2 / SiO2- SiC / SiC-SiO2 / ....... / SiC-SiO2 / SiC-SiO2 / SiO2, or is only a SiC-SiO2 codepostion coating. The prepared gradient composite coating has good long-time oxidation resistance at the temperature of from a room temperature to 1700 DEG C.

Description

technical field [0001] The invention relates to a gradient anti-oxidation composite coating of graphite, C / C composite material and ceramic base material and a preparation method thereof, which provide long-term anti-oxidation protection in the temperature range from room temperature to 1700°C. Background technique [0002] Graphite, C / C composite materials and ceramic-based materials (such as C / C-ceramic composite materials, C / ceramic composite materials, and carbide ceramics) have a series of advantages such as excellent high temperature resistance, ablation resistance, and wear resistance. Especially under inert atmosphere or vacuum conditions, it still has good strength, modulus and other mechanical properties at high temperatures, so it has broad application prospects in the field of aerospace. However, in an oxidizing atmosphere, these materials will be oxidized rapidly, resulting in catastrophic damage to the material, which greatly restricts its application. Therefo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B41/52C23C16/44C23C16/32C23C16/40C23C16/30
Inventor 李国栋梁武熊翔张红波吴敏
Owner CENT SOUTH UNIV
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