Super-thick super-hard coating and preparation method thereof

A hard coating and superhard technology, which is applied in coatings, chemical instruments and methods, metal material coating technology, etc., can solve the problems of large residual stress of the coating, easy peeling and failure of the coating, poor bonding performance of the film base, etc.

Inactive Publication Date: 2012-10-31
XI AN JIAOTONG UNIV
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Problems solved by technology

[0003] At present, the traditional vapor deposition technology can only produce superhard coatings with a thickness of less than 10 microns. The main reason is that the

Method used

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  • Super-thick super-hard coating and preparation method thereof
  • Super-thick super-hard coating and preparation method thereof

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0022] The invention adopts the arc-enhanced magnetron sputtering ion plating technology to prepare TiAlSiCN super-thick and super-hard coating material. This embodiment provides a method for preparing a TiAlSiCN ultra-thick superhard coating on a high-speed steel substrate. It should be noted that the TiAlSiCN ultra-thick superhard coating prepared by the method of the present invention can be used on any steel substrate material. carried out, not limited to this example.

[0023] The concrete preparation process of this embodiment is:

[0024] (1) Substrate pretreatment: use a high-speed steel substrate (W18Cr4V) with a hardness of HRC=60 after quenching at 1170°C and tempering at 550°C as the sample. After degreasing and polishing the surface, the sample is immersed in acetone for ultrasonic cleaning, and then alcohol dehydration;

[0025] (2) Put...

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Abstract

The invention provides a super-thick super-hard coating and a preparation method thereof. The super-thick super-hard coating comprises a Ti bottom layer deposited on the surface of a basal body, a TiN transitional layer prepared on the Ti bottom layer, and a TiAlSiCN coating prepared on the TiN transitional layer; and the thickness of the super-thick super-hard coating is larger than or equal to 20 microns. During preparation, a columnar electric arc Ti target serves as a Ti source; a planar magnetron sputtering Si target, a planar magnetron sputtering Al target and a planar magnetron sputtering target serve as sources of Si, Al and C correspondingly; Ar serves as an ionization gas; and N2 serves as a reaction gas. According to the invention, the binding force of the basal body to a TiAlSiCN coating as well as the thickness of the TiAlSiCN coating prepared on the basal body is remarkably improved; and as elements such as Si, C and Al are added into the TiN coating, the TiAlSiCN coating with five elements is obtained, and the hardness, the abrasion resistance, the anti-friction quality, the high-temperature oxidization resistance and the corrosion resistance of the coating are further improved.

Description

technical field [0001] The invention belongs to the field of coating material preparation, and in particular relates to an ultra-thick and super-hard TiAlSiCN coating and a preparation method thereof. Background technique [0002] Superhard coating refers to a type of coating material with a hardness ≥ 40GPa. It is currently widely used in mechanical cutting tools, forming mold processing, and surface wear resistance and oxidation resistance enhancement of various parts. In recent years, the use of vapor deposition technology to prepare ultra-thick superhard coatings of more than 20 microns to replace plasma sprayed ceramic coatings or electroplated metal coatings has become a research hotspot in the field of superhard coatings. The ultra-thick and super-hard coating prepared by vapor deposition technology has the advantages of dense film microstructure, high hardness, wear resistance, corrosion resistance (including erosion resistance), oxidation resistance and good coordin...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B9/00C23C14/35C23C14/06C23C14/14
Inventor 马胜利徐可为李泽宇
Owner XI AN JIAOTONG UNIV
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