Crystalline silicon solar cell antireflection film

Abstract

The invention discloses a crystalline silicon solar cell antireflection film which is characterized by comprising a silicon oxynitride film, a titanium dioxide film, a silicon nitride film and a silicon dioxide film sequentially deposited on the surface of a silicon wafer. The refractive index of the four films gradually decreases from the silicon oxynitride film to the silicon dioxide film, and the thickness of the four films gradually increases from the silicon oxynitride film to the silicon dioxide film. The titanium dioxide film has high chemical stability to most chemical substances during production of cells and is high in refractive index and low in absorption rate, the silicon nitride film has good passivating effect on the silicon wafer, the silicon dioxide film has high damage threshold and excellent optical performance, and the silicon oxynitride film has excellent characteristics of silicon nitride and silicon oxide. Consequently, the crystalline silicon solar cell antireflection film can well improve optical conversion efficiency.

Description

[0001] technical field [0002] The invention relates to an anti-reflection film structure of a solar cell, in particular to a stacked anti-reflection film structure, in particular to an anti-reflection film for a crystalline silicon solar cell. Background technique [0003] A solar cell is a device that converts solar energy into electrical energy. The conversion efficiency of a solar cell is generally defined as the ratio of the output power of the cell to the total power of sunlight incident on the surface of the cell. Sunlight will be reflected and refracted when it hits the surface of the cell. In order to improve the conversion efficiency of the cell, it is necessary to reduce the reflection loss as much as possible. The production of anti-reflection film directly affects the reflectivity of solar cells to incident light, and plays a very important role in improving the efficiency of solar cells. [0004] At present, in the large-scale production of crystalline silico...

AI Technical Summary

Problems solved by technology

However, although the existing single-layer or double-layer coatings have been able to achieve better passivation and anti-reflection effects, their reflectivity is still very high. The reflectivity of single-layer coatings is 6.5%-7%. The reflectivity of crystalline silicon solar cells is still very low when the reflectivity is between 5.8% and 6.1%.

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