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Method for preparing high-purity silicane in co-production by improved siemens method

A Siemens method and silane technology, applied in the field of high-purity silane preparation technology, can solve the problems of inability to obtain high-purity polysilicon, cumbersome single process, and high investment risk, and achieve the goal of reducing production and investment risks, increasing flexibility, and optimizing processes. Effect

Active Publication Date: 2013-05-22
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the improved Siemens method cannot obtain high-purity polysilicon, and the existing silane method has the disadvantages of a single cumbersome process and high investment risks.

Method used

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  • Method for preparing high-purity silicane in co-production by improved siemens method
  • Method for preparing high-purity silicane in co-production by improved siemens method
  • Method for preparing high-purity silicane in co-production by improved siemens method

Examples

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Effect test

example 1

[0033]This example uses 5000t / y improved Siemens method polysilicon + 1000t / y silane method high-purity silane output for calculation and illustration.

[0034] Schematic diagram of process flow and material balance image 3 shown.

[0035] 750kg / h industrial grade silicon powder raw material and recycled silicon tetrachloride material enter the hydrogenation process, and react to form a mixture of dichlorodihydrosilane, trichlorosilane and silicon tetrachloride, a total of 15944kg / h, which enters purification and anti-disproportionation Operation; Another feed of the purification and anti-disproportionation process comes from the reduction process. After separation and purification, the silicon tetrachloride material returns to the hydrogenation process, a total of 13263kg / h, and the obtained high-purity trichlorosilicon material is a total of 32547kg / h. Among them, 30134kg / h high-purity trichlorosilane enters the reduction process, and 2413kg / h high-purity trichlorosilane e...

example 2

[0038] This example uses 3000t / y modified Siemens method polysilicon + 3000t / y silane method high-purity silane output for calculation and illustration.

[0039] Schematic diagram of process flow and material balance Figure 4 shown.

[0040] 750kg / h industrial grade silicon powder raw material and recycled silicon tetrachloride material enter the hydrogenation process, and react to form a mixture of dichlorodihydrogen silicon, trichlorosilane and silicon tetrachloride, a total of 15358kg / h, which enters purification and anti-disproportionation Operation; Another feed of the purification and anti-disproportionation process comes from the reduction process. After separation and purification, the silicon tetrachloride material returns to the hydrogenation process, a total of 7958kg / h, and the obtained high-purity trichlorosilane material is a total of 25319kg / h. Among them, 18080kg / h high-purity trichlorosilane enters the reduction process, and 7239kg / h high-purity trichlorosil...

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Abstract

The invention relates to a method for preparing high-purity silicane in co-production by an improved siemens method. The method takes a part of the high-purity trichlorosilane prepared in the process of purifying and disproportionating the polysilicon prepared through the improved siemens method into a reduction process along with the original way to deposit to obtain the polysilicon and takes the other part into a silane preparation process to obtain the high-purity silane products and by -product silicon tetrachloride. The method for preparing high-purity silicane in co-production by an improved siemens method disclosed by the invention has the advantages of greatly improving the purity of silicane by regarding the high-purity trichlorosilane as a raw material, optimizing the product structure, reducing the production and investment risk, reducing the cost and improving the quality as the high-purity silicane is available for preparing zone melting-level polysilicon, and improving the utilization rate of the raw material as a closed cycle is formed.

Description

technical field [0001] The invention relates to a preparation process of high-purity silane, in particular to a process co-produced with the improved Siemens method, and high-purity silane is prepared through multi-step disproportionation of high-purity trichlorosilane, which is suitable for domestic polysilicon enterprises. Background technique [0002] Silane, English name: silane, molecular formula is SiH 4 . As an important silicon source material, silane is widely used in semiconductor microelectronic IC, photovoltaic solar cell PV, liquid crystal display LCD and other industries. [0003] At present, there are three main production methods of silane: sodium aluminum fluoride method, silicon-magnesium alloy method and chlorosilane disproportionation method. Among them, the sodium aluminum fluoride method uses sodium aluminum hydride and silicon tetrafluoride as raw materials to react and synthesize silane gas. After subsequent adsorption, rectification, separation, pu...

Claims

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Application Information

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IPC IPC(8): C01B33/107C01B33/04
Inventor 黄国强王国锋王红星陈锦溢
Owner TIANJIN UNIV