Device for rapidly depositing diamond-like carbon film

A diamond film, fast technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve the problems of reducing film deposition rate, product yield, complexity, etc., and achieve reduced breakdown voltage, discharge stability and Highly effective and self-sustaining effect

Inactive Publication Date: 2014-09-17
UNIV OF SCI & TECH BEIJING
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that during the discharge process of the carbon cathode, it is often accompanied by a large amount of carbon particles splashing, and the equipment for removing carbon particles is not only complicated, but also greatly reduces the deposition rate of the film and the output of the product.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device for rapidly depositing diamond-like carbon film
  • Device for rapidly depositing diamond-like carbon film
  • Device for rapidly depositing diamond-like carbon film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] When the present invention is specifically implemented, a set of parallel plate hollow cathodes with the same external dimensions is designed. The diameter of the upper and lower plates can be determined according to the size of the original vacuum chamber, and a gas path interface is provided on one side of the plates, the gas is supplied through one of the plates, and the substrate is placed on the other plate. Among them, the lower plate is installed on the rotating bracket (the rotating bracket is driven by the motor), and the gas is supplied from the vent of the vacuum chamber. The upper and lower plates are connected by three length-adjustable screws. By adjusting the matching nuts, the distance between the two pole plates can be adjusted. The hollow cathode devices are powered by connecting the radio frequency power supply through the lower plate.

[0030]Figure 3(a) shows the different deposition rates under different working conditions in the flat-plate RF ho...

Embodiment 2

[0032] When the present invention is implemented, a cylindrical hollow cathode system is designed. Any section of the cylinder is used as a gas inlet, and the gas is fed into the cylinder through this end, and the power supply is connected to the wall of the cylinder, and the hollow cathode system is connected to the radio frequency power supply for power supply; the ratio of the length and diameter of the cylinder is less than 12, Within this range, the diameter and length of the metal cylinder are adjustable.

[0033] Figure 3(b) shows the different deposition rates under different working conditions in the cylindrical radio frequency hollow cathode and radio frequency plasma enhanced chemical vapor deposition systems, among which the radio frequency hollow cathode system The diameter of the cylinder d=10-150 mm. The discharge gas is high-purity argon, the gas flow rate is 15-60 sccm, and the working pressure is 0.1-10 Pa. It can be seen from the figure that under the cond...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention is a method and equipment for rapidly preparing a diamond-like film. The radio frequency hollow cathode effect is used to confine the plasma in a specific area, the negative glow area merges, and the gas ionization rate doubles. At the same time, during the radio frequency glow discharge process, electrons are bound between the electrodes and move back and forth in the discharge space, which increases the number of collisions with gas molecules, significantly improves the ionization ability and thus increases the density and energy of the plasma, thereby improving the deposition of thin films. Speed ​​and film quality, and significantly improve production efficiency, reduce product costs, easy to achieve industrial production.

Description

technical field [0001] The invention relates to a preparation device of a diamond-like film, in particular to a preparation device of an efficient and high-quality diamond-like film. Background technique [0002] Diamond-like Carbon films (DLC films for short) are sp 2 and sp 3 The general term for the bonded amorphous carbon film, which has the dual properties of diamond and graphite, including: high hardness and elastic modulus, low coefficient of friction, high wear resistance, high thermal conductivity, high resistivity, good optical transmission Properties, chemical inertness, and good biocompatibility, etc., have broad application prospects in the fields of machinery, electronics, optics, and medicine. [0003] by adjusting sp 2 and sp 3 The relative content of bonds can make its performance adjusted accordingly. Due to the excellent performance of DLC film and its intelligent modulation, the research on its application and promotion is in the ascendant. Since the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C16/27
Inventor 庞晓露杨会生高克玮王燕斌
Owner UNIV OF SCI & TECH BEIJING
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products