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Method for manufacturing nanofluid channel of integrated scaleplate based on flexible template

A technology integrating scale and nanofluid, applied in nanotechnology, photolithography process of pattern surface, optics, etc., can solve the problems of hard template not being well fitted, imprinting structure distortion, deforming hard template, etc. , to achieve the effect of facilitating large-area imprinting and demoulding, small demoulding force, and high production efficiency

Inactive Publication Date: 2013-06-05
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The template used to make micro-nano fluid channels by nanoimprinting method is usually hard. For the surface of the imprinted substrate with uneven surface, the hard template cannot fit well, and there are more polymers to be transferred, and the imprinting pressure is high.
And in the process of nanoimprinting, the difficulty is not the imprinting process, but the detachment of the template after imprinting. This is because the detachment of the hard template is a surface separation process, and the entire plane of the template needs to be removed from the imprinting substrate. Separated at the same time, the huge release force may lead to distortion, deformation of the imprinted structure and even damage to the hard template

Method used

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  • Method for manufacturing nanofluid channel of integrated scaleplate based on flexible template
  • Method for manufacturing nanofluid channel of integrated scaleplate based on flexible template

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] like figure 1 and figure 2 As shown, the fabrication method of the nanofluidic channel with integrated ruler based on the flexible template operates as follows:

[0034] a. The photolithography mask 1 including the grating line structure 10 and the digital scale structure 11 is fabricated by an electron beam method;

[0035] b. Spin-coat AZ1350 photoresist 2 on the quartz template 3, such as figure 1 As shown in the middle A, the grating line structure 10 and the digital scale structure 11 on the photolithography mask 1 are fabricated on the photoresist 2 by optical photolithography, as shown in Fig. figure 1 Shown in B; then by reactive ion etching, the grating line structure and digital scale structure on the photoresist 2 are transferred to the quartz template 3 to form a quartz template 3 with a grating line structure and a digital scale structure, as shown in figure 1 shown in C;

[0036] c. Cast the PDMS viscous liquid onto the quartz template 3, such as ...

Embodiment 2

[0043] like figure 1 and figure 2 As shown, the fabrication method of the nanofluidic channel with integrated ruler based on the flexible template operates as follows:

[0044] a, with embodiment one;

[0045] b, with embodiment one;

[0046] c, with embodiment one;

[0047] d. The quartz piece was ultrasonically treated with acetone for 5 minutes, rinsed with deionized water and dried, then baked at 150°C for 10 minutes and cooled naturally; spin-coat SU-8 photoresist 5 on the surface of the quartz piece, and bake at 100°C for 10 minutes forming a quartz substrate 6;

[0048] e. The PDMS stamp 4 and the quartz substrate 6 produced in step c are stacked and arranged in an orderly manner, such as figure 1 As shown in F, preheat at 100°C for 5 min to soften the SU-8 photoresist 5 on the surface of the quartz substrate 6, use a PDMS flexible rod to roll to the PDMS stamp 4 and apply 1MPa imprinting pressure to exclude the PDMS stamp 4 and SU-8 The air between the photore...

Embodiment 3

[0053] like figure 1 and figure 2 As shown, the fabrication method of the nanofluidic channel with integrated ruler based on the flexible template operates as follows:

[0054] a, with embodiment one;

[0055] b, with embodiment one;

[0056] c, with embodiment one;

[0057] d. The quartz piece was ultrasonically treated with acetone for 5 minutes, rinsed with deionized water and dried, then baked at 130°C for 20 minutes, and cooled naturally; spin-coat SU-8 photoresist 5 on the surface of the quartz piece, and bake at 90°C for 15 minutes forming a quartz substrate 6;

[0058] e. The PDMS stamp 4 and the quartz substrate 6 produced in step c are stacked and arranged in an orderly manner, such as figure 1 As shown in F, preheat at 90°C for 10 min to soften the SU-8 photoresist 5 on the surface of the quartz substrate 6, use a PDMS flexible rod to roll to the PDMS stamp 4 and apply 2MPa imprinting pressure to exclude the PDMS stamp 4 and SU-8 The air between the photore...

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Abstract

The invention relates to a method for manufacturing a nanofluid channel of an integrated scaleplate based on a flexible template. By the method, a hard template is replaced with the flexible template; and the method has the advantages of low cost, low surface energy, high manufacturing efficiency and the like. Before embossing, surface treatment is not needed; in an embossing process, the flexible template can be well attached to the surface of a polymer; so that the number of polymers to be transferred is small, and the embossing pressure is relatively low; after embossing, the flexible template is demolded in a linear separation manner; compared with the surface separation process of demolding of the hard template, the linear separation process has the advantage of small demolding force and large-area embossing demolding is facilitated; furthermore, the scaleplate structure is integrated to the flexible template; the scaleplate structure is finally manufactured to be near to the fluid channel through the template; a test sample is favorably represented; therefore, the function of a device is expanded, and a manufacturing method is updated; the cost is effectively reduced; and the manufacturing efficiency is improved.

Description

technical field [0001] The invention relates to a manufacturing method of a nano fluid channel, in particular to a manufacturing method of a nano fluid channel based on an integrated scale of a flexible template. [0002] Background technique [0003] In recent years, the basic and technological application research related to nanofluidic channels has become an attractive frontier field, which is generally defined as the cross-section of the channel for fluid flow in the size range of hundreds to several nanometers. The fluid transport in it has specific properties, which can change many physicochemical properties that dominate the macroscopic and microscale fluid transport and molecular behavior. The research based on this system not only breaks through some important concepts of traditional theories, but also some in-depth research results have important applications in many fields such as stretching manipulation of DNA molecules, drug release technology, battery technolo...

Claims

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Application Information

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IPC IPC(8): G03F7/00B82Y40/00
Inventor 李小军尤晖孔德义高钧蒋锐朱利凯唐敏王旭迪付绍军
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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