Variable optical attenuator based on liquid crystal cladding polymer optical waveguide
A technology of optical waveguide and polymer, which is applied in the direction of light guide, optics, instruments, etc., can solve the problems of inability to realize integration, large volume, etc., and achieve the effect of increasing dynamic tunable range, large tuning efficiency, and compact structure
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[0021] The present invention will be further described below in conjunction with accompanying drawing.
[0022] Such as figure 1 As shown, a tunable optical attenuator based on a liquid crystal cladding polymer optical waveguide adopts a vertical electrode structure, which specifically includes a silicon substrate 1, a lower electrode 2, a silicon dioxide lower cladding layer 3, and a polymer optical waveguide Core layer 4 , liquid crystal lower alignment layer 5 , liquid crystal spacer layer 6 , liquid crystal layer 7 , liquid crystal upper alignment layer 8 , and upper electrode 9 . The silicon substrate 1 is a heavily doped silicon material with a conductivity of 2×10 -2 More than Ω·cm; directly above the silicon substrate 1, a 7-10 μm thick silicon dioxide lower cladding layer 3 is grown by chemical vapor deposition, and its refractive index is 1.45; directly below the silicon substrate 1, a layer of metal nickel is electroplated by electroless plating , this layer of me...
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