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A kind of preparation method of crystalline silicon nano solar cell

A technology of solar cells and crystalline silicon cells, which is applied in nanotechnology, circuits, electrical components, etc., can solve the problems of expensive production costs, production and application limitations of solar cells, and achieve improved cell efficiency, increased efficiency, and increased back reflection Effect

Active Publication Date: 2016-02-17
CECEP SOLAR ENERGY TECH (ZHENJIANG) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, commercial photovoltaic cells are mainly crystalline silicon and amorphous silicon. Although there is a potential market of about 100 billion US dollars per year in the world, due to the relatively expensive production cost of solar cells, the output and application are limited.
In conclusion, affordable power generation cost and cell efficiency are two huge hurdles facing the photovoltaic cell industry

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0019] Example 1: Apply the preparation method of the crystalline silicon nano solar cell of the present invention to prepare the crystalline silicon nano solar cell:

[0020] (1) The back of the crystalline silicon cell is polished with a mixed acid system to remove mechanical damage and defects of the silicon wafer;

[0021] (2) On the polished emitter layer and the back surface of the crystalline silicon cell, Al is prepared by plasma-enhanced chemical vapor deposition or atomic layer deposition (ALD) 2 o 3 Dielectric film;

[0022] (3) Prepare nanowire arrays on the dielectric film on the back of crystalline silicon cells by chemical etching or laser;

[0023] (4) The nanowire array is diffused on the back of the crystalline silicon cell;

[0024] (5) Passivate the surface properties of nanowire arrays by thermal oxidation process;

[0025] (6) Use laser ablation process to make local contact on the back;

[0026] (7) Preparation of metal electrodes for crystalline s...

Embodiment 2

[0028] Example 2: Apply the preparation method of the crystalline silicon nano solar cell of the present invention to prepare the crystalline silicon nano solar cell:

[0029] (1) The back of the crystalline silicon cell is polished with a mixed acid system to remove mechanical damage and defects of the silicon wafer;

[0030] (2) On the emitter layer and the back surface of the polished crystalline silicon cell, use PECVD to generate silicon oxide and silicon nitride dielectric films;

[0031] (3) Prepare nanowire arrays on the dielectric film on the back of crystalline silicon cells by chemical etching or laser;

[0032] (4) The nanowire array is diffused on the back of the crystalline silicon cell;

[0033] (5) Using electroless plating or electroplating technology, deposit 50nm platinum nanoparticles on the surface of the silicon nanowire array to passivate the surface properties of the nanowire array;

[0034] (6) Use laser ablation process to make local contact on th...

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Abstract

The invention discloses a method for preparing a crystalline silicon nanometer solar cell. The crystalline silicon nanometer solar cell is prepared by polishing the back of the crystalline silicon cell, preparing a dielectric film, preparing a nanowire array, preparing a metal electrode, and testing and sorting. The invention can be effectively compatible with the existing crystalline silicon battery preparation process, can effectively improve the battery efficiency and reduce the cost while saving the upgrade cost.

Description

technical field [0001] The invention relates to the field of crystalline silicon solar cells, in particular to a method for preparing a crystalline silicon nanometer solar cell. Background technique [0002] The manufacturing process of crystalline silicon cells based on semiconductor manufacturing technology has not changed since its birth. With the improvement of technology level and equipment level, the efficiency of crystalline silicon cells has gradually increased. However, the improvement of battery efficiency has become more and more limited only by the improvement of process level. [0003] At present, commercial photovoltaic cells are mainly crystalline silicon and amorphous silicon. Although there is a potential market of about 100 billion US dollars per year in the world, due to the relatively expensive production cost of solar cells, the output and application are limited. In conclusion, affordable power generation cost and cell efficiency are two huge obstacle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18B82Y40/00
CPCY02P70/50
Inventor 范维涛勾宪芳苏杨杨高冠宇姜利凯王鹏
Owner CECEP SOLAR ENERGY TECH (ZHENJIANG) CO LTD
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