Carbon nanotube-based biomimetic material with micro-nano branch structure and preparation method for same
A technology of carbon nanotubes and branched structures, applied in the field of bionic materials, to achieve the effects of overcoming structural damage, high mechanical strength, and high aspect ratio
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Embodiment 1
[0021] (1) Ultrasonic cleaning of single-crystal Si substrates with ethanol and acetone, respectively;
[0022] (2) Using radio frequency magnetron sputtering to deposit Ni catalyst layer on the surface of Si substrate, the specific experimental parameters are that the background vacuum is less than 10 -4 Pa, sputtering pressure 0.5Pa, RF power 50W, sputtering time 10s.
[0023] (3) Put the Si substrate on which the catalyst is deposited into the CVD chamber, and evacuate to less than 10 -4 Pa, the temperature was raised to 800 °C, and CH was introduced 4 as carbon source H 2 is the carrier gas, CH 4 :H 2 =20:100, the pressure is increased to 1000Pa, the growth time is 30 minutes, and the carbon nanotube array is obtained, such as figure 1 (a). It is measured by scanning electron microscope that the height of the carbon nanotube array is 45 micrometers, and the diameter of a single carbon nanotube is 6-8 nanometers measured by transmission electron microscope.
[0024]...
Embodiment 2
[0031] (1) Ultrasonic cleaning of single-crystal Si substrates with ethanol and acetone, respectively;
[0032] (2) Using radio frequency magnetron sputtering to deposit Ni catalyst layer on the surface of Si substrate, the specific experimental parameters are that the background vacuum is less than 10 -4 Pa, sputtering pressure 0.5Pa, RF power 50W, sputtering time 10s.
[0033] (3) Put the Si substrate on which the catalyst is deposited into the CVD chamber, and evacuate to less than 10 -4 Pa, the temperature rises to 800 ℃, pass C 2 H 2 As the carbon source Ar is the carrier gas, C 2 H 2 : Ar=30:100, the pressure is increased to 500Pa, the growth time is 30 minutes, and the patterned carbon nanotube array is obtained.
[0034] (4) Put the carbon nanotube array on the glue machine to fix it, drop liquid PDMS with a viscosity of 300 mPas on the surface, and let it stand for 2 minutes. Under the action of capillary force, PDMS penetrates into the carbon nanotube array to f...
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