Atmospheric pressure low power pulse microwave cold plasma jet flow generating device

Abstract

The invention provides an atmospheric pressure low power pulse microwave cold plasma jet flow generating device. The atmospheric pressure low power pulse microwave cold plasma jet flow generating device is composed of a pulse modulation microwave source, a microwave signal source, an adjustable power amplifier, a double directional coupler and a discharger. A microwave signal and a pulse modulation signal are connected with the adjustable power amplifier via coaxial cables. The adjustable power amplifier, the double directional coupler and the discharger are connected in turn via coaxial radio frequency wires. The discharger comprises a quartz glass tube. The quartz glass tube is wrapped with a layer of copper membrane which seals one end of the glass tube. Eight small holes with diameter of 0.3mm are evenly distributed on a sealing opening of the copper membrane. Argon supplied by a gas distribution system of the device flows into the glass tube via the small holes. The middle of the glass tube is provided with a steel needle with diameter of 1mm, and the steel needle is away from the tube opening for 3mm. An opening is arranged from the sealing opening, and the opening is used for being connected with an SMA head. Plasma with low temperature, high electron concentration and high activity can be generated. Besides, the atmospheric pressure low power pulse microwave cold plasma jet flow generating device is easy to integrate, small in volume, convenient to carry, safe in operation, easy to carry out and relatively low in price.

Description

Technical field: [0001] The invention belongs to the field of microwave plasma technology, and in particular discloses an atmospheric pressure low-power pulse microwave cold plasma jet generator. Background technique: [0002] In traditional microwave plasma jet equipment, the microwave power used by the microwave source is up to 1kW, and the anode voltage of the magnetron is up to 5kV. Therefore, it is difficult to pulse modulate the microwave power of 1kW, and the microwave discharge system is large in size and heavy in equipment. The price is higher. Invention content: [0003] The purpose of the present invention is to overcome the deficiencies of the prior art, and provide an atmospheric pressure low-power pulsed microwave cold plasma jet generator, which can generate plasma with low temperature, high electron concentration and high activity. [0004] In order to solve the existing problems of the background technology, the present invention adopts the following tech...

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Problems solved by technology

[0002] In traditional microwave plasma jet equipment, the microwave power used by the microwave source is up to 1kW, and the anode voltage of the magnetron is up to 5kV. Therefore, it is difficult to pulse modulate the microwave power of 1kW, and the microwave discharge system is large in size and heavy in equipment. higher price

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