Nano-silicon-boron paste and its application to the process of preparing fully shielded boron back field
A technology of nano-silicon-boron paste and boron back field, applied in the field of nano-materials, to reduce production costs, solve warping of silicon wafers, and improve yield
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Embodiment 1
[0041] A kind of nano-silicon-boron slurry, viscosity is 9PaS, described nano-silicon-boron slurry contains 65 parts of sandalwood, 15 parts of terpineol, 4 parts of boron, 1 part of ethyl cellulose, 15 parts of silicon powder, and described silicon powder particle The diameter is 50nm ~ 150nm.
[0042] The process of using the above nano-silicon-boron paste to prepare a fully shielded boron back field is carried out in the following steps: 1. Silicon wafer cleaning and flocking; 2. Printing and drying nano-silicon-boron paste; 3. Boron diffusion; 4. POCl 3 Diffusion; 5. Cleaning of phosphosilicate glass; 6. Deposition of passivation / anti-reflection film; 7. Printing and drying of metal electrodes; 8. Sintering of metal electrodes; step 2, printing boron paste to fully cover the back of the silicon wafer; drying of boron paste Carry out in an air atmosphere on a heating plate, the drying temperature is 350° C., and the drying time is 5 minutes. After drying, the silicon parti...
Embodiment 2
[0044] A nano-silicon-boron slurry with a viscosity of 6 PaS. The nano-silicon-boron slurry contains 75 parts of sandalwood, 5 parts of boron, and 20 parts of silicon powder. The particle size of the silicon powder is 50-150 nm.
[0045] The process of preparing the boron back field using the above-mentioned nano-silicon-boron slurry includes the following steps: 1. Cleaning the p-type silicon wafer and flocking; 2. Printing and drying the nano-silicon-boron slurry; 3. POCl 3 Diffusion; 4. Cleaning of phosphosilicate glass; 5. Deposition of passivation / anti-reflection film; 6. Printing and drying of metal electrodes; 7. Sintering of metal electrodes. The boron paste printing described in step 2 fully covers the back of the silicon wafer. Drying is carried out on a heating plate, the drying temperature is 200° C., and the drying time is 5 minutes. After drying, the silicon particles in the boron slurry remain granular and accumulate naturally, and their appearance is as follow...
Embodiment 3
[0047] A nano-silicon-boron slurry with a viscosity of 6PaS. The nano-silicon-boron slurry contains 75 parts of sandalwood, 5 parts of boron, and 20 parts of silicon powder. The particle size of the silicon powder is 50nm-150nm.
[0048] The process of preparing the boron back field by using the above-mentioned nano-silicon-boron slurry includes the following steps: 1. Cleaning the p-type silicon wafer and flocking; 2. Printing and drying the nano-silicon-boron slurry; 3. Boron diffusion; 4. POCl 3 Diffusion; 5. Cleaning of phosphosilicate glass; 6. Deposition of passivation / anti-reflection film; 7. Printing and drying of metal electrodes; 8. Sintering of metal electrodes. The boron paste printing in step 2 is selected to fully cover the back of the silicon wafer. Drying is carried out on a heating plate, the drying temperature is 200° C., and the drying time is 5 minutes. After drying, the silicon particles in the boron slurry remain granular and naturally piled up, and thei...
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