Fixed supporting beam vibration electromagnetic self-powered microsensor in radio frequency receiving and transmitting assembly of Internet of Things

Abstract

The invention discloses a fixed supporting beam vibration electromagnetic self-powered microsensor in a radio frequency receiving and transmitting assembly of the Internet of Things. The two energy collecting self-powered modules of a piezoelectric transducer and a rectifying antenna system are integrated, and the functions of collection, conversion and energy storage can be respectively achieved on mechanical vibrational energy and stray electromagnetic energy. Gallium arsenide is used as a substrate, and the microsensor is composed of an MEMS fixed supporting beam, a filter circuit, a rectifying circuit and an energy storage capacitor. Fiver layers of an upper electrode, a piezoelectric film, a lower electrode, a silicon nitride dielectric layer and a rectangular microstrip patch antenna are arranged on the MEMS fixed supporting beam from top to bottom. Integration of the two modules can complement each other, the microstrip antenna structure is used as inertia force and deformation of mass block reinforcing beam vibration, and the directivity range of energy collecting by the microstrip patch antenna can be widened along with vibration of the beam. Energy collecting efficiency and power supply capacity are improved, the effective scheme is provided for solving the self-powered problem of a low-power-consumption system, the electromagnetic compatibility performance of the system is enhanced, and the shake of the system structure is reduced.

Description

technical field [0001] The invention proposes a fixed-support beam vibration / electromagnetic self-powered microsensor in a radio frequency transceiver component of the Internet of Things, which belongs to the technical field of microelectromechanical systems. Background technique [0002] With the continuous progress and development of micro-intelligent systems such as the Internet of Things, micro-mechanical systems (MEMS) and wireless sensor networks, the requirements for miniaturization, self-power supply, and low power consumption are getting higher and higher. The energy harvesting self-powered sensor technology emerging in recent years provides an effective solution to the above problems. Thanks to the advancement of micro-power integrated circuit technology and microelectromechanical systems (MEMS), miniature energy-harvesting self-powered sensing technology has become an important research field and is developing rapidly, attracting more and more people's attention. ...

AI Technical Summary

Problems solved by technology

There are obvious defects in traditional batteries: First, its size and weight are still too large compared to micro-sensor devices, which limits the further miniaturization of micro-sensors; second, the energy supply life is limited, and batteries need to be replaced or charged after a period of use. Under normal circumstances, it is not allowed to replace the battery in the device structure and system; the third is that the use of a large number of batteries will cause harm to the environment

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