Cantilever beam vibration and electromagnetism self-powered microsensor of Internet-of-things radio frequency transceiving assembly

Abstract

The invention discloses a cantilever beam vibration and electromagnetism self-powered microsensor of an Internet-of-things radio frequency transceiving assembly. According to the cantilever beam vibration and electromagnetism self-powered microsensor, two energy collection self-powered modules including a piezoelectric transducer and a rectification antenna system are integrated, and can play a role in energy collection, energy conversion and energy storage of mechanical vibration energy and stray electromagnetic energy respectively. The cantilever beam vibration and electromagnetism self-powered microsensor is arranged on a gallium arsenide substrate, and comprises an MEMS cantilever beam, a filter circuit, a rectifying circuit and an energy storage capacitor, wherein the MEMS cantilever beam is composed of an upper electrode, piezoelectric film, a lower electrode, a silicon nitride dielectric layer and rectangular microstrip patch antennas from top to bottom, and an oval structure at the tail end is supported by two abreast narrow beams connected with anchoring areas. According to the cantilever beam vibration and electromagnetism self-powered microsensor, the two energy collection self-powered modules can complement with each other through integration of the two energy collection self-powered modules, rectangular microstrip patch antenna structures serve as mass blocks to improve inertia force and deformation of a cantilever beam in the vibration process, and vibration extension antennas of the cantilever beam are used for collecting the directivity range of energy. According to the cantilever beam vibration and electromagnetism self-powered microsensor of the Internet-of-things radio frequency transceiving assembly, energy collection efficiency and the power supply capacity are improved, and influence of a stray magnetic field and mechanical vibration on the Internet-of-things radio frequency transceiving assembly is reduced.

Description

technical field [0001] The invention proposes a cantilever beam vibration / electromagnetic self-powered microsensor in a radio frequency transceiver component of the Internet of Things, which belongs to the technical field of microelectromechanical systems. Background technique [0002] With the rapid development of micro-intelligent systems such as the Internet of Things and micro-electromechanical systems (MEMS), how to effectively solve the problem of miniaturization and self-power supply of low-power electronic devices has attracted widespread attention. Traditional chemical storage batteries that are still widely used, such as nickel metal hydride batteries, lithium polymer batteries, etc. Traditional chemical storage batteries have obvious disadvantages: their size and weight are large, and they are inconvenient to carry, which limits the miniaturization of the microsystem; the durable use time is limited, and the battery needs to be replaced or charged. In many cases, ...

AI Technical Summary

Problems solved by technology

Traditional chemical storage batteries have obvious disadvantages: their size and weight are large, and they are inconvenient to carry, which limits the miniaturization of the microsystem; the durable use time is limited, and the battery needs to be replaced or charged. In many cases, the cost of replacing the battery is high; Contains a large amount of heavy metals and dielectric solutions such as waste acid and alkali, which will pose a huge threat to the environment

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