Organic electroluminescent device and preparation method thereof
An electroluminescence device and electroluminescence technology, which are applied in the manufacturing of organic semiconductor devices, electric solid state devices, semiconductor/solid state devices, etc., can solve problems such as complex structure, and achieve the effect of improving injection capacity and simple structure
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[0051] See also figure 2 , The manufacturing method of the organic electroluminescent device 100 of one embodiment includes the following steps:
[0052] In step S110, a cathode 20 is prepared by vacuum sputtering on the surface of the transparent substrate 10, and the material of the cathode 20 is a transparent conductive oxide.
[0053] Vacuum sputtering at a vacuum pressure of 1×10 -3 ~1×10 -5 Performed under Pa.
[0054] The material of the transparent substrate 10 is glass.
[0055] In this embodiment, the transparent substrate 10 is pre-treated before the cathode 20 is formed on the surface of the transparent substrate 10. The pre-treatment includes: placing the transparent substrate 10 in deionized water containing detergent for ultrasonic cleaning. Use isopropanol, acetone, ultrasonic treatment for 20 minutes, and then dry with nitrogen.
[0056] Preferably, the material of the cathode 20 is selected from at least one of indium tin oxide film (ITO), indium zinc oxide (IZO), a...
Embodiment 1
[0088] The structure prepared in this embodiment is a glass transparent substrate / ITO / Li / LiF / Bphen / DCJTB:Alq 3 / NPB / CuPc / MoO 3 / Li 2 CO 3 :BCP / Bphen / FIrpic: TPBi / NPB / CuPc / ITO organic electroluminescent device.
[0089] The manufacturing method of this organic electroluminescence device includes the following steps:
[0090] Step 1: Provide a light-transmitting substrate, place the light-transmitting substrate in deionized water containing detergent for ultrasonic cleaning, and then use isopropanol and acetone in ultrasonic waves for 20 minutes, and then dry it with nitrogen.
[0091] Step 2: When the vacuum degree is 5×10 -4 In the Pa vacuum coating system, the cathode is sputtered on the surface of the transparent substrate. The material is ITO with a thickness of 100nm; then it is transferred to a vacuum of 5×10 -4 In the Pa thermal evaporation system, a low work function metal layer is prepared by evaporation on the surface of the cathode, the material is Li, the thickness is 5nm, ...
Embodiment 2
[0097] The structure prepared in this embodiment is a glass transparent substrate / AZO / Ca / LiF / BCP / DPVBi / 2-TNATA / ZnPc / WO 3 / Li 2 CO 3 :Alq 3 / TPBi / Ir(piq) 3 :CBP / NPB / WO 3 / AZO's organic electroluminescent device.
[0098] The manufacturing method of this organic electroluminescence device includes the following steps:
[0099] Step 1: Provide a light-transmitting substrate, place the light-transmitting substrate in deionized water containing detergent for ultrasonic cleaning, and then use isopropanol and acetone in ultrasonic waves for 20 minutes, and then dry it with nitrogen.
[0100] Step 2: When the vacuum degree is 1×10 -3 In the Pa vacuum coating system, the cathode is sputtered on the surface of the transparent substrate. The material is AZO and the thickness is 70nm; then it is transferred to a vacuum of 1×10 -3 In Pa thermal evaporation system, a low work function metal layer is prepared by evaporation on the surface of the cathode, the material is Ca, the thickness is 10nm, an...
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