Optical vacuum cold station for light microscope and electron microscope correlated imaging
A correlative imaging and vacuum cooling technology, which is applied in optics, optical components, and material analysis through optical means, can solve the problems of easy damage, easy pollution, and popularization of objective lens damage technology, so as to avoid the deformation of the carrier grid and solve the pollution problem effect
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[0014] Example one:
[0015] Such as figure 1 As shown, this embodiment includes a vacuum chamber 1, one end of the vacuum chamber 1 is provided with an anti-pollution system adapter interface 2, and the other end is provided with an electron microscope sample rod adapter interface 3. An upper optical window 4 and a lower optical window 5 are provided on the upper and lower walls of the vacuum chamber 1 opposite to each other. The upper and lower optical windows 4 and 5 can be connected to the vacuum chamber 1 by bolts to facilitate disassembly. A vacuum system adapting interface 6 is provided on one side of the vacuum chamber 1, which is used to connect a vacuum pump group for extracting vacuum for the vacuum chamber 1. A vacuum valve 7 is provided in the vacuum chamber 1 between the electron microscope sample rod adapter interface 3 and the upper and lower optical windows 4, 5. A pre-vacuum is formed between the vacuum valve 7 and the electron microscope sample rod adapter inte...
Example Embodiment
[0023] Embodiment two:
[0024] Such as figure 1 As shown, on the basis of the first embodiment, this embodiment also includes an anti-pollution system. The anti-pollution system includes a heat conduction rod 9 partially extending into the vacuum chamber 1 through the anti-pollution system adapting interface 2. The heat conduction rod 9 is located One end of the vacuum chamber 1 is connected to a metal cold box 10, the metal cold box 10 is opposite to the upper and lower optical windows 4 and 5, and a pair of light-passing holes are provided on the upper and lower surfaces of the metal cold box 10 (in the figure) Not shown). One end of the heat conducting rod 9 located outside the vacuum chamber 1 is connected to a heat conducting core 11. The anti-pollution system also includes a Dewar tank 12. A liquid nitrogen chamber is formed inside the Dewar tank 12. The liquid nitrogen chamber is filled with liquid nitrogen and the tank opening is covered by the liquid nitrogen chamber c...
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