Method for rapid preparation of high-purity yttrium oxide coating for plasma etching machine
A plasma, yttrium oxide technology, applied in coating, metal material coating process, melt spraying and other directions, can solve the problems of large heat input, slow coating speed, low coating purity and uniformity, etc. Longevity, high bond strength, high resistance to high-energy plasma erosion performance
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[0014] Before spraying, sandblasting and ultrasonic cleaning are used to remove surface oxides and attached impurities.
[0015] Firstly, the parts are fixed in a proper way, the surface is dried with pure compressed air, and the non-coated part of the substrate is protected with a special protective tape for thermal spraying.
[0016] Thoroughly clean the powder feeder, powder feed tube, spray gun, and keep the spraying environment clean and pollution-free. Maintain a large amount of exhaust and dust removal during the spraying process to ensure that a high-purity yttrium oxide coating is obtained.
[0017] The high-purity yttrium oxide ceramic powder produced by Beijing General Research Institute of Mining and Metallurgy (or with equivalent performance parameters) is used, and the process parameters shown in Table 1 are used for spraying.
[0018] Finally, remove the protective tape of the parts, thoroughly clean the equipment and environmental sanitation, and complete the spraying p...
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