A kind of method for preparing cobalt oxide electrode of nano sheet structure

A technology of cobalt oxide and nanosheets, applied in the direction of hybrid capacitor electrodes, etc., can solve the problem of low specific capacitance, achieve the effect of improving charge and discharge rate, simple method, and simple preparation process

Active Publication Date: 2016-02-03
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention solves the problem of low specific capacitance in the existing cobalt oxide pseudocapacitor, and provides a method for preparing a nanosheet structure cobalt oxide electrode

Method used

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  • A kind of method for preparing cobalt oxide electrode of nano sheet structure
  • A kind of method for preparing cobalt oxide electrode of nano sheet structure

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specific Embodiment approach 1

[0018] Embodiment 1: A method for preparing a nanosheet structure cobalt oxide electrode described in this embodiment is specifically carried out according to the following steps:

[0019] 1. Put the Si substrate in an acetone solution and ultrasonically clean it for 10-20 minutes, and then use magnetron sputtering equipment to prepare a Co coating on the Si substrate to obtain a Co-coated silicon wafer;

[0020] 2. Place the Co-coated silicon wafer in the plasma-enhanced chemical vapor deposition vacuum device, evacuate to a pressure below 5Pa, pass in argon gas, adjust the flow rate of the argon gas to 10sccm-50sccm, and adjust the plasma-enhanced chemical vapor deposition vacuum The pressure in the device is 100Pa~1000Pa, and under the pressure of 100Pa~1000Pa and argon atmosphere, the temperature is raised to 500℃~800℃ within 25min;

[0021] 3. Introduce oxygen, adjust the gas flow rate of oxygen to 10sccm, adjust the gas flow rate of argon to 50sccm~90sccm, adjust the pre...

specific Embodiment approach 2

[0027] Embodiment 2: This embodiment differs from Embodiment 1 in that: in Step 1, a Co coating with a thickness of 10 nm˜1000 nm is prepared on the Si substrate by using a magnetron sputtering device. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0028] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that in step 1, a Co coating with a thickness of 100 nm is prepared on the Si substrate by using a magnetron sputtering device. Others are the same as in the first or second embodiment.

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Abstract

The invention discloses a method for preparing a cobaltous oxide electrode with a nanosheet structure, relates to a method for preparing an electrode, and aims at solving the problem that an existing cobaltous oxide pseudocapacitor is relatively low in specific capacitance. The method disclosed by the invention comprises the following steps: preparing a Co coating on an Si base, and then putting into a plasma enhanced chemical vapor deposition vacuum device; introducing argon, adjusting the gas flow and the pressure intensity, heating to a certain temperature, introducing oxygen, adjusting the gas flow of argon and oxygen, and adjusting the temperature, the radio frequency power and the pressure intensity; and carrying out deposition, so as to obtain the cobaltous oxide electrode with the nanosheet structure after deposition is ended. The method is used for preparing the cobaltous oxide electrode with the nanosheet structure.

Description

technical field [0001] The present invention relates to methods of preparing electrodes. Background technique [0002] Supercapacitor is a new type of energy storage element between traditional capacitors and batteries. It has higher specific capacitance and energy density than traditional capacitors, and higher power density than batteries, so it has broad application prospects. In order to meet various applications in the future, the preparation of high energy density and power density, long cycle life, and low-cost supercapacitor electrode materials has become the key to its widespread use. [0003] According to different energy storage mechanisms, electrochemical capacitors are currently divided into electric double layer capacitors and pseudocapacitors. Among them, various carbon materials are widely used in electric double layer capacitors, which are characterized by high conductivity, large specific surface area, and good circulation, but their specific capacitance i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G11/46
Inventor 亓钧雷林景煌张兴凯谈雪琪周玉杨冯吉才
Owner HARBIN INST OF TECH
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