Periodically poled Ti-diffusion near-stoichiometry lithium niobate slab waveguide and preparation method

A near-stoichiometric and periodic polarization technology, applied in the field of optical waveguides, can solve the problems that cannot meet the requirements of miniaturization and integration of optical devices, and achieve the effects of less crystal defects, high efficiency and low noise

Inactive Publication Date: 2015-04-22
TIANJIN UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

In the past, a class of devices made of lithium niobate and other bulk materials as core components

Method used

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  • Periodically poled Ti-diffusion near-stoichiometry lithium niobate slab waveguide and preparation method
  • Periodically poled Ti-diffusion near-stoichiometry lithium niobate slab waveguide and preparation method
  • Periodically poled Ti-diffusion near-stoichiometry lithium niobate slab waveguide and preparation method

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[0034] The specific implementation of the present invention is as follows:

[0035] (1) Sample preparation. The invention chooses optical grade Z-cut 0.5mm thick lithium niobate wafers of the same composition as the starting material. Use a precision cutting machine to cut the wafer into 15mm (length) × 10mm (width) samples;

[0036] (2) Lithography. First, put the cleaned sample on the hot plate and bake for 10 minutes at a temperature of 85°C. Then, use a homogenizer to coat a layer of SPR6112B photoresist on the sample, and set the rotation speed of the homogenizer to 3000r / min and the time to be 1min. After that, the sample after spin-coated photoresist was baked for 10 minutes at 85°C. Next, carry out exposure treatment: After the photoresist in the exposed part is dissolved, it is quickly cleaned with pure deionized water. Then use a high-purity high-pressure nitrogen gun to blow dry the sample. Put the sample and the mask on the operating table of the lithography machi...

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Abstract

The invention discloses a preparation method of a periodically poled Ti-diffusion near-stoichiometry lithium niobate slab waveguide. The preparation method includes the eight steps of sample preparation, photoetching, sputtering of a Ti-metal film, stripping, pre-diffusion of the Ti-metal film, Li-rich VTE processing, polishing of an optical waveguide end surface and periodical poling. Compared with the prior art, the optical waveguide is good in performance, small in loss and good in optical uniformity, has a few crystal defects, has the unique advantages of being high in speed, low in noise, high in efficiency and free of chirping in the wavelength conversion process, converts multiple wave lengths downwards and upwards simultaneously at the same efficiency, and can realize fully transparent conversion.

Description

Technical field [0001] The present invention relates to the field of optical waveguides, in particular to a method for preparing near-stoichiometric Ti:PPLN lithium niobate strip optical waveguides through titanium diffusion, VTE (Vapour Phase Transport Equilibrium) and periodic polarization. Background technique [0002] A waveguide is a structure used to directional guide electromagnetic waves. Common waveguide structures mainly include parallel double wires, coaxial lines, parallel slab waveguides, rectangular waveguides, circular waveguides, microstrip lines, slab dielectric optical waveguides and optical fibers. From the perspective of guiding electromagnetic waves, they can be divided into internal and external regions, and electromagnetic waves are restricted to propagate in the internal region (the principle of transverse resonance is required to be satisfied in the cross-section of the waveguide). [0003] Generally, waveguide refers to hollow metal waveguides and surface...

Claims

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Application Information

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IPC IPC(8): G02B6/13
CPCG02B6/13
Inventor 华平壤陈朝夕
Owner TIANJIN UNIV
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