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Diamond-like thick film, preparation method of diamond-like thick film and work-piece

A diamond thick film and diamond-like film technology, applied in the field of materials, can solve problems such as peeling failure and reduced matching degree, and achieve the effects of reducing stress, strong bonding force, and avoiding deterioration of mechanical properties

Active Publication Date: 2015-05-20
CHONGQING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Similarly, due to the existence of heterogeneous elements, the properties of the functional layer are changed, resulting in a decrease in the physical and mechanical properties of the functional layer (DLC-W) and the diamond-like carbon layer. peel failure

Method used

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  • Diamond-like thick film, preparation method of diamond-like thick film and work-piece

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preparation example Construction

[0048] The present invention also provides a method for preparing a diamond-like thick film, comprising the following steps:

[0049] Deposit a bonding layer and a transition layer sequentially on the surface of the workpiece to be plated;

[0050] By changing the energy of carbon ions or carbon-hydrogen ion clusters, superimposed deposition of sp on the surface of the transition layer 3 Diamond-like subfilms with different bond contents, the sp 3 Diamond-like sub-films with different bond contents are stacked to form a diamond-like film layer compounded in the transition layer.

[0051] In the present invention, before depositing a diamond-like thick film on the surface of the workpiece to be plated, the surface of the workpiece to be plated needs to be pretreated, specifically:

[0052] (1) The workpiece to be plated is degreased with lye, rinsed with pure water, dehydrated and dried with hot air to remove rust, oil stains and other stains on the surface of the workpiece t...

Embodiment 1

[0097] Degrease the workpiece to be plated with a sodium hydroxide solution with a mass concentration of 1% to 3%, rinse with pure water, dehydrate and dry with hot air at 120°C to remove rust, oil stains and other stains on the workpiece; The plated workpiece is placed in the vacuum chamber, the vacuum chamber is evacuated, and the vacuum chamber is heated to 150°C at the same time. When the vacuum degree of the vacuum chamber is lower than 5×10 -4 After Pa, the vacuum chamber temperature was adjusted and stabilized at 120 °C.

[0098] Introduce argon gas into the vacuum chamber, run the anode layer ion source in the high-voltage low-current discharge mode to generate argon ions, and at the same time, turn on the bias power supply, where the bias power supply is a pulse power supply, and set the bias value to -1500V. The workpiece to be plated is cleaned by plasma glow for 45 minutes to obtain a clean workpiece to be plated.

Embodiment 2

[0100] Adopt magnetron sputtering method to deposit a layer of titanium binding layer on the surface of the clean workpiece to be plated provided in embodiment 1, the thickness of this binding layer is 0.1 micron, and the bias power supply is set to-120V in the deposition process, and the bias power supply can be DC power supply;

[0101] Secondly, a titanium carbide transition layer is deposited on the surface of the bonding layer by magnetron sputtering to obtain a workpiece to be plated on which the bonding layer and the transition layer are deposited. Wherein, the thickness of the transition layer is 0.1 micron; the bias power is set to -60V during the deposition process, and the bias power is a pulse power.

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Abstract

The invention provides a diamond-like thick film. The diamond-like thick film comprises a binding layer, a transition layer and a diamond-like film layer, wherein the transition layer is compounded with the binding layer; the diamond-like film layer is compounded with the transition layer; and the diamond-like film layer is formed by overlapping diamond-like sub-films having different sp3 bond contents. According to the invention, the diamond-like film layer is formed by overlapping the diamond-like sub-films having different sp3 bond contents; additional hetero elements are not introduced; therefore, the difficulty that the mechanical property of the film layer is deteriorated due to doping of the hetero elements is effectively avoided; furthermore, by overlapping the diamond-like sub-films having different sp3 bond contents, the stress between the layers is greatly reduced; the binding force between the layers is higher; and thus, the layers cannot be separated.

Description

technical field [0001] The invention belongs to the technical field of materials, and in particular relates to a diamond-like thick film, a preparation method thereof, and a workpiece. Background technique [0002] Diamond-like Carbon (DLC) film refers to carbon atoms mainly sp 2 and sp 3 Amorphous carbon film with properties very similar to diamond due to hybrid bonding. Diamond-like carbon films have high hardness, low friction coefficient, high wear resistance, good chemical stability, thermal conductivity, electrical insulation, light transmission and biocompatibility, and have broad application prospects. However, DLC film has not been widely used in the world. One of the main technical obstacles is that DLC film has high internal stress, and it is difficult to prepare a thick film (such as a thickness greater than 2 microns) with good adhesion to the substrate. Can not meet the practical requirements. The higher internal stress of the diamond-like film mainly comes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35B32B15/00B32B9/00
Inventor 孙德恩张文勇陈美容黄佳木
Owner CHONGQING UNIV
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